Title:
ORIENTED PIEZOELECTRIC FILM
Document Type and Number:
WIPO Patent Application WO2003043824
Kind Code:
A3
Abstract:
A piezoelectric device can be prepared by placing an acicular seed crystal on a substrate, orienting the seed crystal on the substrate, and growing a piezoelectric film from the acicular seed crystal.
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Inventors:
HOISINGTON PAUL A (US)
Application Number:
PCT/US2002/036210
Publication Date:
November 13, 2003
Filing Date:
November 13, 2002
Export Citation:
Assignee:
SPECTRA INC (US)
HOISINGTON PAUL A (US)
HOISINGTON PAUL A (US)
International Classes:
B28B1/30; B41J2/045; B41J2/055; B41J2/16; C30B5/00; H01L41/09; H01L41/187; H01L41/22; H02N2/04; (IPC1-7): C30B25/02
Foreign References:
US6441537B1 | 2002-08-27 | |||
US6373461B1 | 2002-04-16 |
Other References:
See also references of EP 1444389A4
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