Title:
ORTHOGONALLY ARRANGED MULTI-MASS MEMS GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2024/087324
Kind Code:
A1
Abstract:
An orthogonally arranged multi-mass MEMS gyroscope, comprising an anchor unit (1), a sensing unit (2), and a driving unit (3). The anchor unit (1) comprises a central anchor sub-unit (11) located at the center of a rectangle, and four corner anchors (12) respectively located at four corners of the rectangle; the sensing unit (2) comprises four detection mass blocks (21) that are of a frame structure, are respectively elastically connected between the central anchor sub-unit (11) and the corner anchors (12), and mutually form relief spaces, and comprises four detection decoupling members (22) that are respectively located in the detection mass blocks (21); the driving unit (3) comprises four driving mass blocks (31) respectively located in the relief spaces, and driving decoupling members (32) respectively elastically connected to the driving mass blocks (31). The orthogonally arranged multi-mass MEMS gyroscope can increase the arrangement area of a transducer and reduce the mass of the detection mass blocks to improve the Coriolis gain, thereby improving the mechanical sensitivity of the MEMS gyroscope.
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Inventors:
MA ZHAO (CN)
YANG SHAN (CN)
ZHAN ZHAN (CN)
YAN SHITAO (CN)
KAN XIAO (CN)
PENG HONGTAO (CN)
LI YANG (CN)
LAI KAHKEEN (CN)
TAN QIUYU (CN)
YANG SHAN (CN)
ZHAN ZHAN (CN)
YAN SHITAO (CN)
KAN XIAO (CN)
PENG HONGTAO (CN)
LI YANG (CN)
LAI KAHKEEN (CN)
TAN QIUYU (CN)
Application Number:
PCT/CN2022/136304
Publication Date:
May 02, 2024
Filing Date:
December 02, 2022
Export Citation:
Assignee:
AAC KAITAI TECH WUHAN CO LTD (CN)
International Classes:
G01C19/56
Foreign References:
| CN216593437U | 2022-05-24 | |||
| CN103900548A | 2014-07-02 | |||
| CN212320730U | 2021-01-08 | |||
| CN101858931A | 2010-10-13 | |||
| CN114719833A | 2022-07-08 | |||
| JP2011242257A | 2011-12-01 |
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
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