Title:
OVERHEAD CARRIER AND OVERHEAD CARRYING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/220582
Kind Code:
A1
Abstract:
This overhead carrier comprises: an article holding unit for holding an article; a linear drive unit that drives the article holding unit to linearly move; a rotation drive unit that drives the article holding unit to rotate horizontally; and a control unit that controls the rotation drive unit according to the orientation of an article held by the article holding unit and the orientation of a load port on which the article is placed.
Inventors:
ITO YASUHISA (JP)
Application Number:
PCT/JP2021/005478
Publication Date:
November 04, 2021
Filing Date:
February 15, 2021
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
B61B3/02; B61B13/00; B61D47/00; B65G1/04; B65G49/07; H01L21/677
Domestic Patent References:
| WO2015174181A1 | 2015-11-19 | |||
| WO2018037762A1 | 2018-03-01 | |||
| WO2018037762A1 | 2018-03-01 |
Foreign References:
| KR20140141827A | 2014-12-11 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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