Title:
OXIDE INSULATOR FILM, ELECTRONIC DEVICE AND METHOD FOR PRODUCING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/054697
Kind Code:
A1
Abstract:
The present invention provides an oxide insulator film which is not susceptible to the occurrence of variation in the withstand voltage of an insulator. This oxide insulator film (10) contains a first metal oxide (1) and a second metal oxide (2). The electrical conductivity of the second metal oxide (2) is lower than the electrical conductivity of the first metal oxide (1). This oxide insulator film (10) is configured by dispersing the first metal oxide (1) in a matrix that contains the second metal oxide (2).
Inventors:
SASAKI TAKASHI
TAGUCHI SEIJI
NAGASAKI YOSHIHISA
TAKIZAWA TOSHIYUKI
TAGUCHI SEIJI
NAGASAKI YOSHIHISA
TAKIZAWA TOSHIYUKI
Application Number:
PCT/JP2021/032356
Publication Date:
March 17, 2022
Filing Date:
September 02, 2021
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01L21/316; C04B35/01; C23C14/08; C23C14/34; H01B3/10; H01G4/10; H01G4/33; H01L21/283; H01L27/04; H01L29/51; H01L29/78
Foreign References:
| US20150380477A1 | 2015-12-31 | |||
| JP2006216792A | 2006-08-17 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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