Title:
OXIDE MULTILAYER BODY AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2020/067235
Kind Code:
A1
Abstract:
A multilayer body which comprises an electrode layer and a semiconductor layer that contains a group III-V nitride semiconductor, and which is configured such that: the electrode layer contains magnesium oxide and zinc oxide; the molar ratio of magnesium to the total of magnesium and zinc in the electrode layer, namely Mg/(Mg + Zn) is from 0.25 to 0.75 (inclusive); and the electrical conductivity of the electrode layer is 1.0 × 10-2 S/cm or more.
Inventors:
UEOKA YOSHIHIRO (JP)
TOMAI SHIGEKAZU (JP)
KATSUMATA SATOSHI (JP)
KUSHIMOTO MAKI (JP)
DEKI MANATO (JP)
HONDA YOSHIO (JP)
AMANO HIROSHI (JP)
TOMAI SHIGEKAZU (JP)
KATSUMATA SATOSHI (JP)
KUSHIMOTO MAKI (JP)
DEKI MANATO (JP)
HONDA YOSHIO (JP)
AMANO HIROSHI (JP)
Application Number:
PCT/JP2019/037751
Publication Date:
April 02, 2020
Filing Date:
September 26, 2019
Export Citation:
Assignee:
IDEMITSU KOSAN CO (JP)
UNIV NAGOYA NAT UNIV CORP (JP)
NIKKISO CO LTD (JP)
UNIV NAGOYA NAT UNIV CORP (JP)
NIKKISO CO LTD (JP)
International Classes:
C23C14/08; C23C14/14; C23C14/58; H01L21/28; H01L29/43
Domestic Patent References:
| WO2009072365A1 | 2009-06-11 | |||
| WO2012014688A1 | 2012-02-02 |
Foreign References:
| JP2010053454A | 2010-03-11 | |||
| JPH08245220A | 1996-09-24 | |||
| JP2014500403A | 2014-01-09 | |||
| JP2005209734A | 2005-08-04 | |||
| JP2007019488A | 2007-01-25 | |||
| JPH08245220A | 1996-09-24 | |||
| JP2014129230A | 2014-07-10 |
Other References:
See also references of EP 3859046A4
Attorney, Agent or Firm:
HEIWA INTERNATIONAL PATENT OFFICE (JP)
Download PDF:
Previous Patent: CONTROL DEVICE
Next Patent: METHOD FOR PRODUCING GRAIN-ORIENTED ELECTROMAGNETIC STEEL SHEET, AND COLD ROLLING EQUIPMENT
Next Patent: METHOD FOR PRODUCING GRAIN-ORIENTED ELECTROMAGNETIC STEEL SHEET, AND COLD ROLLING EQUIPMENT