Title:
PALLETIZED CONVEYANCE MECHANISM AND SUBSTRATE INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/052773
Kind Code:
A1
Abstract:
A palletized conveyance mechanism (2), in a palletized conveyance apparatus which conveys a plurality of pallets (6, 7) supporting a substrate, is provided with a conveyance mechanism (3) which conveys the pallets (6, 7) and a holding mechanism (4) which holds the pallets (6, 7) in a resting state. The holding mechanism (4) mechanically switches the holding operation and releasing operation of the pallets (6, 7) in cooperation with a fixation part provided at a conveyance position or holding position or fixation parts provided at both of the positions. When the pallets (6, 7) are at the conveyance position, holding of the pallets (6, 7) is released to allow conveyance by the conveyance mechanism (3); when the pallets (6, 7) are at the holding position, the pallets (6, 7) are held to hold the resting state to suppress displacement. When conveying the substrate using the resting pallets (6, 7), vibration of the resting pallets (6, 7) is suppressed without using an electrical constitution, thereby suppressing phase shifting between tooth parts of the conveyance mechanism (3) provided to the resting pallets (6, 7).
Inventors:
TANAKA GAKU (JP)
Application Number:
PCT/JP2008/070165
Publication Date:
May 14, 2010
Filing Date:
November 06, 2008
Export Citation:
Assignee:
SHIMADZU CORP (JP)
TANAKA GAKU (JP)
TANAKA GAKU (JP)
International Classes:
H01L21/677
Foreign References:
| JPH04231464A | 1992-08-20 | |||
| JP2006168957A | 2006-06-29 | |||
| JPH11247957A | 1999-09-14 | |||
| JPH06183477A | 1994-07-05 | |||
| JP2005223296A | 2005-08-18 |
Attorney, Agent or Firm:
SHIONOIRI, Akio (JP)
Akio Shionoiri (JP)
Akio Shionoiri (JP)
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