Title:
PATCH-TYPE PLASMA DIAGNOSIS DEVICE AND PLASMA DIAGNOSIS MODULE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/195622
Kind Code:
A1
Abstract:
Provided are a patch-type plasma diagnosis device and a plasma diagnosis module comprising same, the plasma diagnosis device comprising a substrate unit, a signal line unit, a resonance pattern, and a signal analysis unit. The signal line unit is formed on the substrate unit. The resonance pattern is formed on the substrate unit, is spaced apart a predetermined distance from the signal line unit or extends therefrom, and resonates applied ultra-high frequency. The signal analysis unit is connected by wire or wirelessly to the signal line unit and analyzes plasma by applying or detecting the ultra-high frequency.
Inventors:
KIM DAE-WOONG (KR)
KANG WOO SEOK (KR)
HUR MIN (KR)
KIM HYEONG U (KR)
KIM MUYOUNG (KR)
KANG WOO SEOK (KR)
HUR MIN (KR)
KIM HYEONG U (KR)
KIM MUYOUNG (KR)
Application Number:
PCT/KR2023/002055
Publication Date:
October 12, 2023
Filing Date:
February 13, 2023
Export Citation:
Assignee:
KOREA INST MACH & MATERIALS (KR)
International Classes:
H01J37/32; H05H1/00
Foreign References:
| KR101119769B1 | 2012-03-22 | |||
| KR101225011B1 | 2013-01-22 | |||
| KR20180116445A | 2018-10-24 | |||
| JP2011507195A | 2011-03-03 | |||
| US9601397B1 | 2017-03-21 |
Attorney, Agent or Firm:
KIM, Min-tae (KR)
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