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Patent Searching and Data


Title:
PATTERN FORMING METHOD, BASE AGENT AND LAMINATE
Document Type and Number:
WIPO Patent Application WO/2018/078929
Kind Code:
A1
Abstract:
A pattern forming method which comprises a step for applying a base agent onto a substrate and a step for applying a self-assembling composition for pattern formation onto a substrate surface to which the base agent has been applied, thereby forming a self-assembled film by means of self-assembling phase separation, and wherein the self-assembling composition for pattern formation contains a block copolymer which comprises a polymer moiety a that has at least one of the structures represented by formula (103) or formula (104) and a polymer moiety b that has a structure represented by formula (105), while having a sugar moiety content of from 3% by mass to 80% by mass (inclusive). A base agent which contains a polymer comprising at least one unit selected from among optionally substituted units derived from (meth)acrylates and optionally substituted units derived from styrene, and which is used for the purpose of causing a phase separation of a self-assembling composition for pattern formation containing a block copolymer which comprises a polymer moiety a that has at least one of the structures represented by formula (103) or formula (104) and a polymer moiety b that has a structure represented by formula (105), while having a sugar moiety content of from 3% by mass to 80% by mass (inclusive). A laminate which sequentially comprises, in the following order, a substrate, a base layer that contains a polymer comprising at least one unit selected from among optionally substituted units derived from (meth)acrylates and optionally substituted units derived from styrene, and a pattern formation layer that contains a block copolymer which comprises a polymer moiety a that has at least one of the structures represented by formula (103) or formula (104) and a polymer moiety b that has a structure represented by formula (105), while having a sugar moiety content of from 3% by mass to 80% by mass (inclusive).

Inventors:
MORITA KAZUYO (JP)
HATTORI KIMIKO (JP)
Application Number:
PCT/JP2017/020103
Publication Date:
May 03, 2018
Filing Date:
May 30, 2017
Export Citation:
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Assignee:
OJI HOLDINGS CORP (JP)
International Classes:
B05D7/24; B05D1/36; B32B27/28; B32B27/30; C08F293/00; C09D5/00; C09D125/04; C09D133/04; C09D133/14; C09D153/00; H01L21/027
Domestic Patent References:
WO2012013911A12012-02-02
WO2012177839A12012-12-27
WO2009140429A22009-11-19
WO2014162872A12014-10-09
WO2017110190A12017-06-29
Foreign References:
JP2016108435A2016-06-20
JP2014185311A2014-10-02
JP2010091630A2010-04-22
JP2014047269A2014-03-17
JP2016079242A2016-05-16
JP2004124088A2004-04-22
JP2014005325A2014-01-16
JP2012062365A2012-03-29
JP2016107206A2016-06-20
JP2012100546A2012-05-31
JP2012180424A2012-09-20
JP2014148629A2014-08-21
JPS5729537B21982-06-23
Other References:
TING, S. R. SIMON ET AL.: "Lectin Recognizable Biomaterials Synthesized via Nitroxide-Mediated Polymerization of a Methacryloyl Galactose Monomer", MACROMOLECULES, vol. 42, no. 24, 2009, pages 9422 - 9434, XP055605898
KE ,BEI-BEI ET AL.: "Controllable Construction of Carbohydrate Microarrays by Site-Directed Grafting on Self-Organized Porous Films", LANGMUIR, vol. 26, no. 11, 2010, pages 8946 - 8952, XP055605904
See also references of EP 3533524A4
TOSHIBA REVIEW, vol. 67, no. 4, 2012, pages 44 - 47
MACROMOLECULES, vol. 36, no. 6, 2003
MATERIAL MATTERS, vol. 5, no. 1
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, vol. 29, no. 5, 2016, pages 653 - 657
Attorney, Agent or Firm:
SIKS & CO. (JP)
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