Title:
PBNZT FERROELECTRIC FILM, SOL-GEL SOLUTION, FILM FORMING METHOD, AND METHOD FOR PRODUCING FERROELECTRIC FILM
Document Type and Number:
WIPO Patent Application WO/2011/089748
Kind Code:
A1
Abstract:
Disclosed is a PBNZT ferroelectric film in which oxygen ion deficiency can be sufficiently prevented. According to one embodiment of the present invention, a PBNZT ferroelectric film is composed of a perovskite-structured ferroelectric body represented by ABO3, and the PBNZT ferroelectric film is characterized in that the perovskite-structured ferroelectric body is composed of a PZT-based ferroelectric body that contains Pb2+ ions as the A-site ions, while containing Zr4+ ions and Ti4+ ions as the B-site ions, and that Bi3+ ions are contained as A-site compensation ions in the A-site and Nb5+ ions are contained as B-site compensation ions in the B-site.
Inventors:
KIJIMA TAKESHI (JP)
HONDA YUUJI (JP)
HONDA YUUJI (JP)
Application Number:
PCT/JP2010/062864
Publication Date:
July 28, 2011
Filing Date:
July 23, 2010
Export Citation:
Assignee:
YOUTEC CO LTD (JP)
KIJIMA TAKESHI (JP)
HONDA YUUJI (JP)
KIJIMA TAKESHI (JP)
HONDA YUUJI (JP)
International Classes:
H01L21/316; C01G33/00
Foreign References:
| JP2006096647A | 2006-04-13 | |||
| JPH09223831A | 1997-08-26 | |||
| JP2009293130A | 2009-12-17 | |||
| JP2009117592A | 2009-05-28 | |||
| JP2006278986A | 2006-10-12 | |||
| JPS60236404A | 1985-11-25 | |||
| JPH07252664A | 1995-10-03 | |||
| JP2006176385A | 2006-07-06 |
Other References:
C. CONSTANTIN ET AL.: "Pyroelectric detectors from RF sputtering PZT type materials", KEY ENGINEERING MATERIALS, vol. 132-136, 1997, pages 1120 - 1122
Attorney, Agent or Firm:
YANASE, Mutsuyasu et al. (JP)
Mutsuyasu Yanase (JP)
Mutsuyasu Yanase (JP)
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Claims: