PELLICLE, EXPOSURE ORIGINAL PLATE WITH PELLICLE, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, METHOD FOR PRODUCING LIQUID CRYSTAL DISPLAY PANEL, METHOD FOR RECYCLING EXPOSURE ORIGINAL PLATES, AND METHOD FOR REDUCING RELEASE RESIDUE

Title:

Document Type and Number:

WIPO Patent Application WO/2020/213659

Kind Code:

A1

Abstract:

[Problem] To provide a pellicle, exposure original plate with pellicle, method for recycling exposure original plates and method for reducing peel residue, with which it is possible to reduce the residue which adheres to the exposure original plate when peeling a pellicle from an exposure original plate after use in lithography, particularly after use in ArF lithography. [Solution] A pellicle (10) comprising a pellicle film (12), a pellicle frame (11) which is provided with the pellicle film (12) at one end surface thereof, an adhesive layer (14) which is provided to the other end surface of the pellicle frame (11), wherein after affixing the adhesive layer (14) of the pellicle (10) to a quartz mask substrate (1), the part of the pellicle (10) to which the adhesive layer (14) is adhered is irradiated with 10 J/cm2 of 193 nm UV light from the rear of the substrate (1), and when the pellicle (10) has been peeled after being irradiated, the amount of peeling residue of the adhesive layer (14) that remains on the substrate (1) does not exceed 0.5 mg.

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Inventors:

HAMADA YUICHI (JP)
NISHIMURA AKINORI (JP)

Application Number:

PCT/JP2020/016624

Publication Date:

October 22, 2020

Filing Date:

April 15, 2020

Export Citation:

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Assignee:

SHINETSU CHEMICAL CO (JP)

International Classes:

G03F1/62; G03F7/20

Domestic Patent References:

WO2015053223A1

2015-04-16

Foreign References:

JP2007156397A	2007-06-21
JP2013134481A	2013-07-08
JP2015198160A	2015-11-09
JP2018021182A	2018-02-08
JP2016018008A	2016-02-01
JP2010002895A	2010-01-07
JPS5638693B2	1981-09-08
JP2016018008A	2016-02-01
JP2006146085A	2006-06-08
JP2008021182A	2008-01-31
JPS5513616B2	1980-04-10

Other References:

POLYMER ENGINEERING AND SCIENCE, vol. 14, no. 2, 1974, pages 148 - 154
See also references of EP 3958060A4

Attorney, Agent or Firm:

SHIMAZAKI Eiichiro (JP)

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