Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PELLICLE FILM, PELLICLE, CARBON NANOTUBE WEB AND MANUFACTURING METHOD THEREFOR, CARBON NANOTUBE FILM, AND CARBON NANOTUBE THREAD AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/090682
Kind Code:
A1
Abstract:
Provided is a technology that makes it possible to achieve a pellicle film that is made of carbon nanotubes and has superior in-plane uniformity in terms of transmittance. A pellicle film (12) includes: a plurality of first carbon nanotubes (1200a) that each extend in a first direction (D1) and are arranged in a radial direction; and a plurality of second carbon nanotubes (1200b) that each extend in a second direction (D2) intersecting the first direction (D1) and are arranged in a radial direction.

Inventors:
TAKADA NAOYA (JP)
SEKI KAZUNORI (JP)
KODERA YUTAKA (JP)
Application Number:
PCT/JP2020/039512
Publication Date:
May 14, 2021
Filing Date:
October 21, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOPPAN PRINTING CO LTD (JP)
International Classes:
G03F1/62
Domestic Patent References:
WO2009054422A12009-04-30
Foreign References:
JP2018194840A2018-12-06
JP2012153540A2012-08-16
JP2018115083A2018-07-26
JP2019049077A2019-03-28
Other References:
See also references of EP 4057064A4
Attorney, Agent or Firm:
KURATA, Masatoshi et al. (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND INFORMATION PROCESSING PROGRAM

Next Patent: INFORMATION DEVICE