Title:
PELLICLE FRAME BODY FOR FLAT PANEL DISPLAY, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2020/045299
Kind Code:
A1
Abstract:
The present invention provides: an FPD pellicle frame body in which external color is controlled so as to make it easy to prevent scattering of exposure light, to inspect for adhesion of foreign objects before use, etc.; and an efficient method for manufacturing the FPD pellicle frame body. This FPD pellicle frame body is constituted from a stainless-steel material having a transparent oxide coating, the film thickness of the transparent oxide coating being 420-700 nm. The brightness index L* due to the interference color of reflected light from the surface of the transparent oxide coating and the surface of the stainless steel material is preferably 33 or less.
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Inventors:
KOMURA NAOTO (JP)
NAKANO KOICHI (JP)
IIZUKA AKIRA (JP)
NAKANO KOICHI (JP)
IIZUKA AKIRA (JP)
Application Number:
PCT/JP2019/033109
Publication Date:
March 05, 2020
Filing Date:
August 23, 2019
Export Citation:
Assignee:
NIPPON LIGHT METAL CO (JP)
International Classes:
G03F1/64
Foreign References:
| JP2016218162A | 2016-12-22 | |||
| JP2015036791A | 2015-02-23 | |||
| JP2004361649A | 2004-12-24 | |||
| JPS61213380A | 1986-09-22 | |||
| JP2006284927A | 2006-10-19 | |||
| JP2016090784A | 2016-05-23 | |||
| JP2009003111A | 2009-01-08 | |||
| JP2006284927A | 2006-10-19 | |||
| JP2013007762A | 2013-01-10 |
Other References:
See also references of EP 3845967A4
Attorney, Agent or Firm:
IPR CONSULTANT PPC (JP)
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