Title:
PELLICLE FRAME GRASPING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/137874
Kind Code:
A1
Abstract:
With the present invention, a pellicle frame can be correctly grasped even if warped. The present invention comprises: a frame body (10) that is a frame-shaped member in which a plurality of rod-shaped members are assembled in a substantially rectangular shape; a plurality of pellicle grasping members (21) provided to the frame body (10); and a drive unit provided to each of the pellicle grasping members (21), the drive unit moving the pellicle grasping member between a first position at which the pellicle grasping member is inserted in a groove, and a second position at which the pellicle grasping member is not inserted in the groove. Each pellicle grasping member (21) has a plate-shaped or rod-shaped tip part, a portion of which being inserted in the groove when the pellicle grasping member (21) is in the first position. The tip part has a tip face that is inserted in the groove when the pellicle grasping member (21) is in the first position, the tip face being extended in a second direction that is substantially perpendicular to a first direction, which is the direction in which the pellicle grasping member moves. The tip part is provided with a marker that indicates the distance from the tip face.
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Inventors:
YONEZAWA MAKOTO (JP)
Application Number:
PCT/JP2021/041615
Publication Date:
June 30, 2022
Filing Date:
November 11, 2021
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
G03F1/62; H01L21/673
Domestic Patent References:
| WO2016133054A1 | 2016-08-25 |
Foreign References:
| JP2019128501A | 2019-08-01 | |||
| JP2012103638A | 2012-05-31 | |||
| JP2007017811A | 2007-01-25 | |||
| JP2011158585A | 2011-08-18 |
Attorney, Agent or Firm:
SAKATA Yukari (JP)
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