Title:
PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEVICE COMPRISING SAME, AND PELLICLE THERMAL DURABILITY EVALUATION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/059916
Kind Code:
A1
Abstract:
Provided is a pellicle thermal durability evaluation device. The pellicle thermal durability evaluation device may comprise: a chamber; a pellicle holder which is disposed in the chamber and on which a pellicle is seated; a durability measurement unit including a temperature measurement module for measuring the temperature of the pellicle seated on the pellicle holder; and a light source unit which irradiates the pellicle by controlling the intensity of light according to the type of the pellicle seated on the pellicle holder.
Inventors:
AHN JINHO (KR)
WI SEONG JU (KR)
JANG YONG JU (KR)
WI SEONG JU (KR)
JANG YONG JU (KR)
Application Number:
PCT/KR2021/010473
Publication Date:
March 24, 2022
Filing Date:
August 09, 2021
Export Citation:
Assignee:
IUCF HYU (KR)
International Classes:
G03F1/84; G03F1/62
Foreign References:
| KR20200088529A | 2020-07-23 | |||
| KR20200066540A | 2020-06-10 | |||
| JP2019174628A | 2019-10-10 | |||
| JPH10176918A | 1998-06-30 | |||
| JP2014215588A | 2014-11-17 | |||
| KR20130060351A | 2013-06-07 |
Attorney, Agent or Firm:
PARK, Sang Youl (KR)
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