PELLICLE AND MASK ADHESIVE AGENT FOR USE IN SAME

Title:

PELLICLE AND MASK ADHESIVE AGENT FOR USE IN SAME

Document Type and Number:

WIPO Patent Application WO/2012/004951

Kind Code:

A1

Abstract:

The purpose is to provide a pellicle which has a mask adhesive layer that can be plastic-deformed readily particularly at a temperature at which exposure to light is carried out, rarely remains an adhesive agent upon the removal of the mask adhesive layer from a mask and has good handling properties, and which can prevent the position gap of a pattern. For achieving the purpose, a pellicle (10) is provided, which comprises a pellicle frame (14), a pellicle film (12) and a mask adhesive layer (15) containing a mask adhesive agent. The mask adhesive agent comprises 100 parts by mass of a thermoplastic elastomer (A) having a tanδ peak temperature of -20 to 30°C and 20 to 150 parts by mass of an adhesiveness-imparting resin (B), wherein the thermoplastic elastomer (A) is at least one component selected from the group consisting of a styrene thermoplastic elastomer, a (meth)acrylic acid ester thermoplastic elastomer and an olefin thermoplastic elastomer, and the mask adhesive agent has a tanδ peak temperature of -10 to 30°C.

Inventors:

TANEICHI DAIKI
KOZEKI TAKASHI
KOIDE AKIHIRO

Application Number:

PCT/JP2011/003706

Publication Date:

January 12, 2012

Filing Date:

June 29, 2011

Export Citation:

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Assignee:

MITSUI CHEMICALS INC (JP)
TANEICHI DAIKI
KOZEKI TAKASHI
KOIDE AKIHIRO

International Classes:

C09J133/00; C09J153/00

Domestic Patent References:

WO2010116848A1

2010-10-14

Foreign References:

JPH04237056A	1992-08-25
JPH10282640A	1998-10-23
JP2007156397A	2007-06-21
JP2008174727A	2008-07-31
JP2003202660A	2003-07-18
JP2008065258A	2008-03-21
JPH08151557A	1996-06-11
JP2008159701A	2008-07-10
JP2009012464A	2009-01-22
JP2000267261A	2000-09-29
JPH04237056A	1992-08-25
JPH11323072A	1999-11-26
JP2008103718A	2008-05-01
JP2008103719A	2008-05-01

Other References: