Title:
PELLICULAR COMPLEX AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2020/008976
Kind Code:
A1
Abstract:
A pellicular complex comprises a carbon film (A), a film part (B) face-to-face-bonded to one side of the carbon film, and a frame part (C) that is arranged along the outer edge of the film part (B), wherein an element constituting the frame part (C) is contained in the film part (B) as at least a part of constituent elements of the film part (B). Preferably, the element constituting the frame part (C) comprises at least one element selected from the group consisting of silicon, zirconium, niobium, molybdenum, titanium and tungsten. Preferably, the film part (B) satisfies at least one of the following requirements: a requirement that the film part (B) is a layer made from the same material as that of the frame part (C); and a requirement that the film part (B) is a layer containing both of an element constituting the frame part (C) and carbon.
Inventors:
KAWASHIMA YUKI (JP)
MURAKAMI MUTSUAKI (JP)
MURAKAMI MUTSUAKI (JP)
Application Number:
PCT/JP2019/025422
Publication Date:
January 09, 2020
Filing Date:
June 26, 2019
Export Citation:
Assignee:
KANEKA CORP (JP)
International Classes:
G03F1/62; G03F1/64
Domestic Patent References:
| WO2015178250A1 | 2015-11-26 |
Foreign References:
| US20170205705A1 | 2017-07-20 | |||
| US20170090278A1 | 2017-03-30 |
Attorney, Agent or Firm:
USFI PATENT ATTORNEYS INTERNATIONAL OFFICE (JP)
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