Title:
PERC CELL PREPARATION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/110613
Kind Code:
A1
Abstract:
The present invention relates to the technical field of photovoltaics, and relates in particular to a PERC cell preparation method mainly used to improve the efficiency of PERC cells. The present invention comprises a diffusion step, an etching step, and a back film processing step carried out in sequence. In the etching step, an etching solution is used, and the chemical composition of the etching solution comprises HNO3, HF, H2SO4, and H2O. In the back film processing step, SiH4 and NH3 are used to perform coating deposition on the rear side of a silicon wafer, and the coating deposition is performed twice. Compared with the prior art, the present invention improves the refractive index of substrates of silicon wafers, and improves the light absorption rate of PERC cells, thereby improving the efficiency of PERC cells.
Inventors:
HE YIFENG (CN)
LV WENHUI (CN)
QIU XIAOYONG (CN)
YAN WENSHENG (CN)
TAN XINYU (CN)
ZHAO QINGGUO (CN)
WANG XINGZHU (CN)
LV WENHUI (CN)
QIU XIAOYONG (CN)
YAN WENSHENG (CN)
TAN XINYU (CN)
ZHAO QINGGUO (CN)
WANG XINGZHU (CN)
Application Number:
PCT/CN2021/086886
Publication Date:
June 02, 2022
Filing Date:
April 13, 2021
Export Citation:
Assignee:
ZHEJIANG BEYONDSU PV CO LTD (CN)
International Classes:
H01L31/18; C23C16/34; C23F1/24; H01L31/068
Foreign References:
| CN112635617A | 2021-04-09 | |||
| CN109994553A | 2019-07-09 | |||
| CN107731960A | 2018-02-23 | |||
| CN111029414A | 2020-04-17 | |||
| CN111987191A | 2020-11-24 | |||
| CN111403551A | 2020-07-10 | |||
| CN111416002A | 2020-07-14 |
Attorney, Agent or Firm:
ZHEJIANG KG IP LAW FIRM (CN)
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