Title:
PEROVSKITE-TYPE OXIDE FILM AND FERROELECTRIC FILM USING SAME, FERROELECTRIC ELEMENT, AND PROCESS FOR PRODUCING PEROVSKITE-TYPE OXIDE FILM
Document Type and Number:
WIPO Patent Application WO/2012/056658
Kind Code:
A1
Abstract:
[Problem] To provide a piezoelectric element which has excellent signal-transmitting and -receiving abilities and which is suitable for use in piezoelectric actuators, sensors, ultrasonic sensors and power generating elements. [Solution] A perovskite-type oxide film (1) is formed on a substrate (10), has an average film thickness of 5μm or more, and is characterized by containing a perovskite-type oxide represented by general formula (P): (K1-w-x, Aw, Bx) (Nb1-y-z, Cy, Dz)O3 [wherein 0
Inventors:
SAKASHITA YUKIO (JP)
FUNAKUBO HIROSHI (JP)
KUROSAWA MINORU (JP)
ISHIKAWA MUTSUO (JP)
EINISHI HIROSHI (JP)
SHIRAISHI TAKAHISA (JP)
FUNAKUBO HIROSHI (JP)
KUROSAWA MINORU (JP)
ISHIKAWA MUTSUO (JP)
EINISHI HIROSHI (JP)
SHIRAISHI TAKAHISA (JP)
Application Number:
PCT/JP2011/005881
Publication Date:
May 03, 2012
Filing Date:
October 20, 2011
Export Citation:
Assignee:
FUJIFILM CORP (JP)
TOKYO INST TECH (JP)
SAKASHITA YUKIO (JP)
FUNAKUBO HIROSHI (JP)
KUROSAWA MINORU (JP)
ISHIKAWA MUTSUO (JP)
EINISHI HIROSHI (JP)
SHIRAISHI TAKAHISA (JP)
TOKYO INST TECH (JP)
SAKASHITA YUKIO (JP)
FUNAKUBO HIROSHI (JP)
KUROSAWA MINORU (JP)
ISHIKAWA MUTSUO (JP)
EINISHI HIROSHI (JP)
SHIRAISHI TAKAHISA (JP)
International Classes:
C01G33/00; B41J2/14; B41J2/16; C04B35/00; C23C26/00; H01L21/208; H01L21/8246; H01L27/105; H01L41/08; H01L41/09; H01L41/18; H01L41/22; H01L41/317; H01L41/39
Foreign References:
| JP2007042740A | 2007-02-15 | |||
| JP2006188046A | 2006-07-20 | |||
| JP2006291332A | 2006-10-26 | |||
| JP2007324538A | 2007-12-13 | |||
| JP2004284889A | 2004-10-14 |
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (JP)
Seiji Yanagida (JP)
Seiji Yanagida (JP)
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Claims: