Title:
PHOTODETECTOR AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/181536
Kind Code:
A1
Abstract:
The present disclosure pertains to a photodetector and an electronic apparatus that enable the reduction of surface reflection of an on-chip microlens and the suppression of image quality degradation. Provided is a photodetector that has a plurality of pixels having a photoelectric conversion part, an on-chip microlens formed corresponding to each pixel, and an antireflection film formed on the surface of the on-chip microlens, the antireflection film being configured by stacking a first inorganic film formed of a metal oxide film and a second inorganic film formed on the surface of the first inorganic film and having a refractive index lower than that of the first inorganic film. The present disclosure can be applied, for example, to a CMOS-type solid-state imaging device.
Inventors:
MORIYA YUSUKE (JP)
YAMAMOTO ATSUSHI (JP)
YUKAWA TOMIYUKI (JP)
NISHIMURA KOTARO (JP)
IKEHARA SHIGEHIRO (JP)
OTANI SHOGO (JP)
KATO HIROSHI (JP)
YAMAMOTO ATSUSHI (JP)
YUKAWA TOMIYUKI (JP)
NISHIMURA KOTARO (JP)
IKEHARA SHIGEHIRO (JP)
OTANI SHOGO (JP)
KATO HIROSHI (JP)
Application Number:
PCT/JP2022/006922
Publication Date:
September 01, 2022
Filing Date:
February 21, 2022
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/146
Domestic Patent References:
| WO2013179972A1 | 2013-12-05 |
Foreign References:
| JP2017076738A | 2017-04-20 | |||
| JP2013012518A | 2013-01-17 | |||
| JP2016057335A | 2016-04-21 | |||
| JP2012084608A | 2012-04-26 | |||
| JP2011146481A | 2011-07-28 |
Attorney, Agent or Firm:
NISHIKAWA Takashi et al. (JP)
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