PHOTODIODE ARRAY, METHOD FOR MANUFACTURING SAME, AND RADIATION DETECTOR

Title:

PHOTODIODE ARRAY, METHOD FOR MANUFACTURING SAME, AND RADIATION DETECTOR

Document Type and Number:

WIPO Patent Application WO/2004/082025

Kind Code:

A1

Abstract:

A photodiode array, a method for manufacturing the same, and a radiation detector are disclosed wherein noises attributed to damage in a photo-sensing portion which is given during mounting are prevented. A photodiode array (1) comprises an array of a plurality of photodiodes (4) formed on a surface of an n-type silicon substrate (3) upon which a light to be sensed is incident and through wirings (8) which respectively correspond to the photodiodes (4) and penetrate the substrate from the incidence surface to the back surface. The incidence surface of the photodiode array (1) is provided with a transparent resin film (6) which covers the regions where the photodiodes (4) are formed and transmits the light to be sensed.

Inventors:

SHIBAYAMA KATSUMI (JP)

Application Number:

PCT/JP2004/003118

Publication Date:

September 23, 2004

Filing Date:

March 10, 2004

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)
SHIBAYAMA KATSUMI (JP)

International Classes:

H01L27/146; H01L31/09; H01L31/10; G01T1/20; (IPC1-7): H01L27/146; H01L23/12; H01L31/10; G01T1/20

Foreign References:

JP2001339057A	2001-12-07
JP2002270808A	2002-09-20
JP2003068779A	2003-03-07
JP2003066150A	2003-03-05

Other References: