Title:
PHOTOELECTRIC CONVERTER AND X-RAY DETECTOR
Document Type and Number:
WIPO Patent Application WO/2017/170936
Kind Code:
A1
Abstract:
A photoelectric converter according to one aspect of the present invention is provided with an element substrate having a photodiode and a thin film transistor arranged in matrix form, an interlayer insulation film layered on the thin film transistor, a first contact hole formed in the interlayer insulation film and reaching the surface of a source electrode of the thin film transistor, and a second contact hole formed in the interlayer insulation film and reaching the surface of a drain electrode of the thin film transistor. A source bus line and the source electrode of the thin film transistor are connected via the first contact hole, the drain electrode of the thin film transistor and a lower layer electrode of the photodiode are connected via the second contact hole, and the tapered part of the second contact hole has a gentler slope than the tapered part of the first contact hole.
Inventors:
MORIWAKI HIROYUKI
TOMIYASU KAZUHIDE
NAKAZAWA MAKOTO
NAKANO FUMIKI
NAKAMURA WATARU
TOMIYASU KAZUHIDE
NAKAZAWA MAKOTO
NAKANO FUMIKI
NAKAMURA WATARU
Application Number:
PCT/JP2017/013408
Publication Date:
October 05, 2017
Filing Date:
March 30, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L27/146; G01T1/20; H01L21/336; H01L21/768; H01L23/522; H01L27/144; H01L29/786; H01L31/08; H04N5/32; H04N5/369
Foreign References:
| JP2000353808A | 2000-12-19 | |||
| JP2010034520A | 2010-02-12 | |||
| JP2015005533A | 2015-01-08 | |||
| JP2010245079A | 2010-10-28 | |||
| US20130207169A1 | 2013-08-15 | |||
| US20140145198A1 | 2014-05-29 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF:
Previous Patent: PERCUTANEOUS ABSORPTION PREPARATION
Next Patent: SLICE CHANGING METHOD AND SLICE CHANGING DEVICE
Next Patent: SLICE CHANGING METHOD AND SLICE CHANGING DEVICE