Title:
PHOTOMASK AND METHOD FOR CONVEYING INFORMATION ASSOCIATED WITH A PHOTOMASK SUBSTRATE
Document Type and Number:
WIPO Patent Application WO2005079470
Kind Code:
A3
Abstract:
A method for conveying information about a photomask (12) is disclosed. The method includes heating an area of a photomask substrate (16) located between a top surface and a bottom surface of the photomask substrate with a laser. The heat applied to the area of the substrate forms a mark (24) inside the substrate that stores information identifying the photomask substrate (16).
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Inventors:
FRISA LARRY E (US)
KALK FRANKLIN D (US)
KALK FRANKLIN D (US)
Application Number:
PCT/US2005/005097
Publication Date:
February 23, 2006
Filing Date:
February 17, 2005
Export Citation:
Assignee:
DUPONT PHOTOMASKS INC (US)
FRISA LARRY E (US)
KALK FRANKLIN D (US)
FRISA LARRY E (US)
KALK FRANKLIN D (US)
International Classes:
B23K26/06; G03F1/00; G03F1/38; G03F1/60; G03F7/20; (IPC1-7): B23K26/38; G03F9/00
Foreign References:
| US20020044266A1 | 2002-04-18 | |||
| US20030048349A1 | 2003-03-13 | |||
| US20030138742A1 | 2003-07-24 |
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