Title:
PHOTOMASK STORAGE SYSTEM, QUERY SYSTEM, STORAGE METHOD, AND COMPUTER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/028123
Kind Code:
A1
Abstract:
A photomask storage system (504A, 504B), a query system, a storage method, a computer apparatus, and a storage medium. The storage system (504A, 504B) comprises: support devices (10A, 10B) comprising a photomask accommodation region (102A, 102B) used to accommodate a photomask; a storage device (20, 506A, 506B) having a preset coordinate system and position information of the support devices (10A, 10B) within the preset coordinate system; detection devices (30A, 30B) provided in a one-to-one correspondence with the support devices (10A, 10B), and used to detect the support devices (10A, 10B), to send a first detection signal if a photomask is accommodated in the photomask accommodation region (102A, 102B), and to send a second detection signal if a photomask is accommodated outside of the photomask accommodation region (102A, 102B) of the support devices, wherein, the detection devices (30A, 30B) are connected to the storage device (20, 506A, 506B), and the storage device (20, 506A, 506B) is further used to store, upon receiving the first detection signal or the second detection signal, photomask position information of the photomask in the preset coordinate system; and alarm devices (40A, 40B) connected to the detection devices (30A, 30B) in one-to-one correspondence, and used to display an alarm upon receiving the second detection signal.
Inventors:
LIANG XUEYU (CN)
Application Number:
PCT/CN2021/100771
Publication Date:
February 10, 2022
Filing Date:
June 18, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G03F1/66
Foreign References:
| CN110348549A | 2019-10-18 | |||
| CN202594134U | 2012-12-12 | |||
| JPH09148221A | 1997-06-06 | |||
| CN110941145A | 2020-03-31 | |||
| CN103176371A | 2013-06-26 | |||
| DE102007049103A1 | 2009-04-16 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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