Title:
PHOTONIC CRYSTAL SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2005/078512
Kind Code:
A1
Abstract:
Disclosed is a photonic crystal semiconductor device which enables to easily form various optical devices having a photonic crystal structure by using a semiconductor and a semiconductor manufacturing process. Also disclosed is a method for manufacturing such a photonic crystal semiconductor device. The photonic crystal semiconductor device has a photonic crystal structure wherein a lower DBR layer (1), a core layer (2), an upper DBR layer (3) and a dielectric multilayer film (6) composed of multiple dielectric layers are sequentially formed on an n-InP substrate (11) in this order. A plurality of vacancies (9) are formed in the core layer (2) and the upper DBR layer (3) in the film thickness direction, and a line defect portion (10) is in the region between the vacancies (9) where no vacancy (9) is present. The line defect portion (10) functions as an optical waveguide.
Inventors:
KISE TOMOFUMI (JP)
KIMOTO TATSUYA (JP)
YOKOUCHI NORIYUKI (JP)
BABA TOSHIHIKO (JP)
KIMOTO TATSUYA (JP)
YOKOUCHI NORIYUKI (JP)
BABA TOSHIHIKO (JP)
Application Number:
PCT/JP2005/002342
Publication Date:
August 25, 2005
Filing Date:
February 16, 2005
Export Citation:
Assignee:
FURUKAWA ELECTRIC CO LTD (JP)
KISE TOMOFUMI (JP)
KIMOTO TATSUYA (JP)
YOKOUCHI NORIYUKI (JP)
BABA TOSHIHIKO (JP)
KISE TOMOFUMI (JP)
KIMOTO TATSUYA (JP)
YOKOUCHI NORIYUKI (JP)
BABA TOSHIHIKO (JP)
International Classes:
G02B6/12; G02B6/122; G02F1/025; H01S5/12; G02F1/017; H01S5/026; H01S5/10; H01S5/183; H01S5/20; (IPC1-7): G02F1/025; G02B6/12; H01S5/183
Foreign References:
| JP2001257425A | 2001-09-21 | |||
| JP2002341164A | 2002-11-27 | |||
| US5684817A | 1997-11-04 | |||
| JP2003131028A | 2003-05-08 | |||
| JP2002522810A | 2002-07-23 | |||
| JP2002303836A | 2002-10-18 | |||
| JP2004037938A | 2004-02-05 |
Other References:
ITO M. ET AL: "Enhancement of Cavity-Q in a Quasi-Three Dimensional Photonic Crystal", EXTENDED ABSTRACS OF THE 2003 INTERNATIONAL CONFERENCE ON SOLID STAE DEVICE AND MATERIALS, 2003, pages 870 - 871, XP002987982
See also references of EP 1722265A4
See also references of EP 1722265A4
Attorney, Agent or Firm:
Kawawa, Takaho (1-10 Mita 3-chome, Minato-k, Tokyo 73, JP)
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