Title:
PHOTOSENSITIVE RESIN COMPOSITION, CURED PRODUCT THEREOF, AND WIRING STRUCTURE CONTAINING CURED PRODUCT
Document Type and Number:
WIPO Patent Application WO/2022/004285
Kind Code:
A1
Abstract:
Provided are: a photosensitive resin composition; a cured product thereof; and a wiring structure, an electronic component, a semiconductor device, and a camera module containing the cured product. The photosensitive resin composition is cured by irradiation with active energy rays rather than by a heat treatment at a high temperature. This photosensitive resin composition suppresses film reduction after a development process. Furthermore, a finely detailed pattern can be accurately formed through photolithography. One aspect of the present invention pertains a photosensitive resin composition comprising the following components (A) to (C): (A) a modified polyphenylene ether represented by formula (1) and formula (2); (B) a silsesquioxane compound represented by formula (3); and (C) a photopolymerization initiator, and said aspect also pertains to a cured product of the photosensitive resin composition, and a wiring structure, an electronic component, a semiconductor device, and a camera module containing said cured product.
Inventors:
CZUBAROW PAWEL (US)
OTOMO MASAYOSHI (JP)
KAPOGLIS IRMA YOLANDA (US)
KRASCO NICHOLAS CHARLES (US)
LETIZAIII FRANK ANTHONY (US)
SATO TOSHIYUKI (JP)
OTOMO MASAYOSHI (JP)
KAPOGLIS IRMA YOLANDA (US)
KRASCO NICHOLAS CHARLES (US)
LETIZAIII FRANK ANTHONY (US)
SATO TOSHIYUKI (JP)
Application Number:
PCT/JP2021/021563
Publication Date:
January 06, 2022
Filing Date:
June 07, 2021
Export Citation:
Assignee:
NAMICS CORP (JP)
International Classes:
C08F30/08; C08F299/08; G03F7/004; G03F7/027; G03F7/029; G03F7/031; G03F7/075
Domestic Patent References:
WO2018061988A1 | 2018-04-05 | |||
WO2020166288A1 | 2020-08-20 |
Foreign References:
JP2012014021A | 2012-01-19 | |||
JP2017534693A | 2017-11-24 | |||
JP2017047648A | 2017-03-09 |
Attorney, Agent or Firm:
IAT WORLD PATENT LAW FIRM (JP)
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