Title:
PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
Document Type and Number:
WIPO Patent Application WO/2020/032133
Kind Code:
A1
Abstract:
Provided is a photosensitive resin composition having excellent sensitivity, adhesiveness, line-width reproducibility and resolution when heated after exposure, and then developed. In particular, this composition exhibits excellent adhesiveness even if the length of time between exposure and development is long. According to one embodiment, the photosensitive resin composition includes: (A) an alkali-soluble polymer: 10 to 90 mass%; (B) a compound having an ethylenic unsaturated double bond: 5 to 70 mass%; (C) a photo polymerization initiator: 0.01 to 20 mass%; and (D) a phenolic polymerization inhibitor: 1 to 300 ppm. The light transmittance at 375 nm and/or 405 nm is 58 to 95%.
Inventors:
KOSAKA JUNYA (JP)
Application Number:
PCT/JP2019/031219
Publication Date:
February 13, 2020
Filing Date:
August 07, 2019
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
International Classes:
G03F7/031; C08F2/50; C08F290/06; G03F7/004; G03F7/027; G03F7/029; G03F7/033; G03F7/20; G03F7/38; G03F7/40; H05K3/06
Domestic Patent References:
| WO2017002859A1 | 2017-01-05 |
Foreign References:
| JP2006163339A | 2006-06-22 | |||
| JP2009145613A | 2009-07-02 | |||
| JP2007256832A | 2007-10-04 | |||
| JP2010091662A | 2010-04-22 | |||
| JP2010217683A | 2010-09-30 | |||
| JP2006267719A | 2006-10-05 | |||
| JP2016224161A | 2016-12-28 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Download PDF:
Previous Patent: POWER CONVERSION DEVICE
Next Patent: PHOTOCURABLE ADHESIVE SHEET, LAMINATE FOR IMAGE DISPLAY DEVICE, AND IMAGE DISPLAY DEVICE
Next Patent: PHOTOCURABLE ADHESIVE SHEET, LAMINATE FOR IMAGE DISPLAY DEVICE, AND IMAGE DISPLAY DEVICE