Cross-Reference to Other Applications This patent application is a continuation-in-part of U. S. patent application Serial Number 08/740,347, filed November 7,1996, and entitled Thin Transparent Conducting Films of Cadmium Stannate.

Contractual Origin of the Invention The United States Government has rights in this invention under Contract No.

DE-AC36-83CH10093 between the U.S. Department of Energy and the National Renewable Energy Laboratory, a Division of Midwest Research Institute.

Technical Field: The present invention relates generally to photovoltaic devices and more particularly to thin film solar cells comprising a thin transparent conducting film of cadmium stannate.

Background Art: Photovoltaic devices, used extensively in a myriad of applications, have generated considerable academic and commercial interest in recent years. Photovoltaic devices (solar cells) utilize the specific conductivity properties of semiconductors to convert the visible and near visible light energy of the sun into usable electrical energy.

This conversion results from the absorption of radiant energy in the semiconductor materials which frees some valence electrons, thereby generating electron-hole pairs.

The energy required to generate electron-hole pairs in a semiconductor material is referred to as the band gap energy, which in general is the minimum energy needed to excite an electron from the valence band to the conduction band.

Cadmium telluride (CdTe) has long been recognized as a promising semiconductor material for thin-film solar cells due to its near-optimum band gap of 1.5 eV and high absorption coefficient. CdTe is typically coupled with a second semiconductor material of different conductivity type such as cadmium sulfide (CdS)

to produce a high efficiency heterojunction photovoltaic cell. Small-area CdS/CdTe heterojunction solar cells with solar energy to electrical energy conversion efficiencies of more than 16% and commercial-scale modules with efficiencies of about 9% have been produced using various deposition techniques, including close-space sublimation or "CSS" (U.S. Patent No. 5,304,499, issued April 19, 1994, to Bonnet et al.), spray deposition (e.g., J.F. Jordan, Solar Cells, 23 (1988) pp. 107-113), and electrolytic deposition (e.g., B.M. Basol, Solar Cells, 23 (1988), pp. 69-88).

Thin film solar cells typically comprise an optically transparent substrate through which radiant energy enters the device, the intermediate layers of dissimilar semiconductor materials (e.g., CdS and CdTe), and a conductive film back contact.

Generally, when the substrate is not electrically conductive, a thin layer of transparent conductive oxide (TCO) is deposited between the substrate and the first semiconductor layer to function as a front contact current collector. However, conventional TCOs, such as tin oxide, indium oxide, and zinc oxide, have high sheet resistivities (typically about 10 ohms per square), and hence poor conductivity, at thicknesses necessary for good optical transmission. Thus, because of their high sheet resistivities, conventional TCOs are not efficient current collectors in solar cells of any appreciable size (i.e., greater than about one square centimeter), particularly in commercial-scale modules.

One way around the current collection limitation described above is to incorporate a more efficient current collection means, such as a front contact current collector grid, into the TCO layer. These current collector grids generally comprise a network of very low resistivity material that collects electrical current from the transparent conductive layer and channels the current to a central current collector.

For example, U.S. Patent Nos. 4,647,711, 4,595,790 and 4,595,791 to Basol et al.

each disclose a photovoltaic device having a metallic conductive grid integrated into the TCO layer to decrease the series resistance of the device. Although supplementing the TCO layer with a metallic grid may theoretically enhance the current collecting capacity of the solar cell, because the grid material is not optically transparent, the presence of the grid can actually reduce the overall conversion efficiency of the photovoltaic device. Other disadvantages and potential problems commonly

associated with the use of current collector grids include diffusion of the grid material into the semiconductor layers, short circuiting of the device, and incomplete or uneven deposition of the semiconductor layers due to the geometry of the grid.

U.S. Patent No. 4,808,242 to Murata et al. discloses a photovoltaic device having a substrate on which a plurality of transparent electrodes for each photoelectric conversion cell are arranged. Each transparent electrode has a coupling conductor and a plurality of collecting electrodes connected to the coupling conductor. Although the Murata et al. device includes a transparent current collecting network, and thus avoids the problems associated with a non-optically transparent system, it is difficult and expensive to produce due to the additional materials and processing steps required to integrate the intricate arrangement of electrodes and coupling conductors.

It is desirable to create a transparent conducting film between the substrate and the first semiconductor layer that has both low electrical sheet resistance and high optical transmission. Low sheet resistance is a primary requirement of any contact on a semiconductor device to reduce the barrier to carrier flow between the semiconductor device and the external electronic circuit. High optical transmission is also very important to increase the amount of electromagnetic radiation that is absorbed by the semiconductor material, thereby optimizing the operation of the photovoltaic device by maximizing the number of photogenerated electrons available for collection. Unfortunately, it is difficult to provide both of these conditions simultaneously, low sheet resistance and high optical transmission, in the transparent conducting layer using conventional methods and TCO materials. As previously stated, conventional TCOs have high inherent resistivity. High sheet resistance causes ohmic losses in the transparent conducting film, which decreases the overall conversion efficiency of the device. To reduce the sheet resistance of these conventional TCO films, and thus potentially improve device performance, the TCO must be deposited as a relatively thick layer. However, the thicker the transparent conducting film, the lower the transmission and thus the less electromagnetic radiation that reaches the semiconductor material, thereby reducing the conversion efficiency of the solar cell.

Another disadvantage associated with conventional TCO layers in thin film solar cell devices is their generally rough surface morphology. For example, one of the most popular TCOs currently in use, tin oxide (SnO2), when deposited as a thin film by chemical vapor deposition (CVD) typically produces an average surface roughness of between about 100 and 250 Å. Such high surface roughness has several significant disadvantages. First, it is well known that high efficiency solar cells (e.g., thin film CdS/CdTe solar cells) require a very thin semiconductor (CdS) window layer, typically with a thickness of around 600 Å. However, this high SnO2 surface roughness coupled with a thin CdS layer can significantly affect the uniformity of both the CdS layer and the resulting CdS, xTex intermixed layer, which will be described in more detail below.

If the CdS and CdS,,Te, layers are not uniform or complete, this has the adverse effect of increasing interface defects thus reducing open circuit voltage and fill factor, and can ultimately cause severe degradation. Second, a high surface roughness increases the junction area of the solar cell which causes an increased dark current, and hence a lower open circuit voltage and fill factor. Finally, it is desirable to create a smooth surface on the transparent conducting film so that the thickness of the semiconductor window layer can be minimized. Having a very thin window layer means more absorption of optical photons (particularly energy of short wavelength) in the active region of the semiconductor device, and thus improved photovoltaic conversion efficiency.

Another problem with conventional SnO2 is that they can be very difficult to pattern, which limits their commercial applications. It is especially important for commercial applications that the transparent conducting film be easy to pattern or etch, particularly for advanced module and display device processing. Transparent conducting films suitable for commercial use must also be easy to produce, inexpensive, durable, stable under standard processing conditions, and chemically compatible with the semiconductor material, specifically the CdS window layer.

A need therefore exists for an improved, high efficiency, thin film photovoltaic device. This improved device should include a transparent conducting film (TCO) which features a variety of desirable optical, electronic and mechanical properties.

Specifically, the transparent conducting layer should exhibit high electrical conductivity, high optical transmission, relatively smooth surface morphology, good chemical and environmental stability, be easy and inexpensive to produce, and be easily patternable for module production. Ideally, this high efficiency device should have a front contact with a sheet resistivity as low as 2-5 ohms per square and an optical transmittance greater than 85 percent. Until this invention, no such device existed.

Disclosure of the Invention Accordingly, it is a general object of this invention to provide a thin film photovoltaic device having improved optical and electrical properties.

It is a more specific object of this invention to provide a thin film solar cell having a highly conductive TCO layer.

It is a further object of this invention to provide a thin film solar cell having a TCO layer with high optical transmission.

It is yet another object of this invention to provide a thin film solar cell having a TCO layer with a low sheet resistance at thicknesses necessary for good optical transmission.

It is a more specific object of this invention to provide a thin film solar cell having a TCO layer with a sheet resistance less than 3 ohms per square and an optical transmittance greater than about 85 percent.

It is another object of this invention to provide a thin film solar cell having a TCO layer with a low sheet resistance, and hence an efficient current collector, at solar cell sizes greater than about one square centimeter.

It is a yet further object ofthis invention to provide a thin film solar cell having a TCO layer with low surface roughness.

It is a still further object ofthis invention to provide a thin film solar cell having a TCO layer which is highly stable.

It is vet another object of this invention to provide a thin film solar cell having a TCO layer which is easily patternable.

It is another general object ofthis invention to provide a photovoltaic device having all of the above attributes.

It is yet another general object of this invention to provide a method for making a photovoltaic device having all of the above attributes.

To achieve the foregoing and other objects and in accordance with the purposes of the present invention, as embodied and broadly described therein, the articles of manufacture of this invention may comprise a substrate, a layer of cadmium stannate (Cd2SnO4 or "CTO") disposed on said substrate as a front contact, a thin film comprising two or more layers of semiconductor materials disposed on said layer of Cd2SnO4, and an electrically conductive film disposed on said thin film of semiconductor materials to form a rear electrical contact to said thin film.

To further achieve the foregoing and other objects and in accordance with the purposes of the present invention, as embodied and broadly described therein, one embodiment of this invention comprises a process for preparing a photovoltaic device having a layer of Cd2SnO4 as a front contact. The method of this invention includes depositing a Cd2SnO4 layer onto a substrate, depositing a thin film of semiconductor materials onto the layer of Cd2SnO4, and depositing an electrically conductive film onto the thin film of semiconductor materials.

Brief Description of the Drawings The accompanying drawings, which are incorporated in and form a part of the specifications, illustrate the preferred embodiments of the present invention, and together with the descriptions serve to explain the principles of the invention.

In the Drawings: Figure 1 is a cross-sectional view (not in actual scale or proportion) of a photovoltaic device, such as a solar cell, in accordance with the present invention.

Figure 2 is a graph showing the relative intensities of x-ray diffraction peaks as a function of 2 theta for a Cd2SnO4 layer prior to heat treatment and the cadmium stannate film after treatment.

Figure 3a is a graph showing the transmittance for the cadmium stannate film shown in Figure 2 and a commercially available SnO2 thin film.

Figure 3b is a graph showing the absorbance for the cadmium stannate film shown in Figure 2 and a commercially available SnO2 thin film.

Figure 4a is an atomic force micrograph showing the surface morphology of a conventional SnO2 film.

Figure 4b is an atomic force micrograph showing the surface morphology of a cadmium stannate film.

Figure 5 is an optical micrograph of a photolithographically patterned cadmium stannate film which was etched in dilute HCl for 2 minutes.

Figure 6 is a graph of resistivity as a function of temperature for the cadmium stannate and SnO2 films shown in Figures 3 and 4.

Figure 7 is a graph of current and voltage for a photovoltaic device of the present invention. Figure 8 is a graph of open circuit voltage as a function of CdCl2 concentration for a set of photovoltaic devices of the present invention and a set of photovoltaic devices comprising a commercially available SnO2 thin film.

Detailed Description of the Preferred Embodiments Figure 1 shows a cross-sectional view of a photovoltaic device of the present invention. The photovoltaic device generally referred to by reference number 20 comprises a transparent substrate 22 through which radiant energy enters the device.

A thin transparent conducting oxide (TCO) film of cadmium stannate (Cd2SnO4) 24 is deposited onto the transparent substrate 22 and is contiguous thereto. The cadmium stannate film 24 is deposited between the transparent substrate 22 and the first semiconductor layer 26 (described below) to function as a front contact current collector. The cadmium stannate film 24 thus replaces the conventional TCO films commonly used in photovoltaic devices. A first semiconductor layer 26 is disposed on the cadmium stannate film 24 and a second semiconductor layer 28 is disposed on the first semiconductor layer 26. The conductivity types of semiconductor layers 26 and 28 are not the same. A back electrical contact 30 is disposed over the second semiconductor layer 28 and in ohmic contact therewith.

The illustrations of photovoltaic device 20 and its various portions or components in Figure 1 are not intended to be drawn to scale or even in proportion, because the very thin components and layers of the photovoltaic device 20 are impractical, if not impossible, to illustrate to scale or in proper proportion. Therefore.

this figure is for illustrative purposes only, as will be understood by persons skilled in this art.

The present invention also provides a method of making a photovoltaic device 20, which method includes depositing a film of cadmium stannate 24 onto a transparent substrate 22. The cadmium stannate film 24 is formed by RF sputtering a layer of substantially amorphous Cd2SnO4 onto a suitable transparent substrate 22. A layer of CdS is formed on a second substrate (not shown), such as soda lime glass, by a suitable technique, such as RF sputtering or chemical bath deposition. The coated CdS layer is placed in contact with the Cd2SnO4 layer and heated to a treatment temperature sufficient to induce crystallization of the Cd2SnO4 layer. The resulting uniform, crystalline cadmium stannate film 24 has significantly improved electrical and optical properties when compared to the properties of previously available TCO films. The above-described method for depositing a film of cadmium stannate 24 onto a transparent substrate 22 is described in a related copending U.S. patent application entitled "Thin Transparent Conducting Films of Cadmium Stannate," which is incorporated by reference herein. Following deposition of the cadmium stannate film 24, at least two semiconductor materials of differing conductivity types (semiconductor layers 26 and 28) are deposited on the cadmium stannate film 24 to function as a semiconductor for the device 20.

For the purpose of providing a detailed description and an enabling embodiment, but not for the purpose of limitation, this description refers to a first semiconductor layer 26 of CdS and a second semiconductor layer 28 of CdTe.

However, the present invention can be practiced using any suitable combination of semiconductor materials of differing conductivity types including, but not limited to, CdS/CdTe, CdS/HgCdTe, CdS/CdZnTe, and CdS/ZnTe.

As is apparent to one skilled in the art, the substrate 22 for the cadmium stannate film 24 must be optically transparent over the range of light wavelengths for which transmission through the substrate is desired. Suitable transparent substrates 22 allowing transmission of visible light include silica and glass. Also, the transparent substrate 22 must be of a material capable of withstanding heat treatment at

temperatures of 550"C or more, as described below, and the cadmium stannate film 24 must adhere to the transparent substrate 22 material. The thermal expansion coefficient of the transparent substrate 22 must be close enough to the thermal expansion coefficient of the cadmium stannate film 24 to prevent cracking or buckling of the cadmium stannate film 24 during heat treatment.

In accordance with the present invention, a cadmium stannate film 24 is created by RF sputtering from a hot-pressed target containing stoichiometric amounts of SnO2 and CdO onto the transparent substrate 22. The sputtering can be conducted in substantially pure oxygen which is substantially free of impurities which could react with the metal oxides present. Preferably, the oxygen is 99.999% pure. It is also preferred that the sputtering is at room temperature. As deposited by RF sputtering, the Cd2SnO4 layer is yellowish in color and substantially amorphous. As is apparent to one skilled in the art, higher transmittance is obtained with a thinner film, and lower sheet resistance is obtained with a thicker film.

The CdS layer may be formed on a second substrate (not shown) by any method known to those skilled in the art. For example, the CdS layer may be formed by chemical bath deposition or sputtering. Although there is no maximum layer thickness, the coating should be thick enough for reuse. The CdS layer must also have a smooth surface and be uniform and free of pinholes.

The second substrate may be any material known to those skilled in the art which is capable of withstanding heat treatment up to 550"C or more. The material must be one to which CdS will adhere. Also, the coated substrate must have a CdS layer surface which is sufficiently flat to make good contact with the Cd2SnO4 layer, as described below. Further, the second substrate must not react chemically with CdS at the treatment temperature. A suitable, inexpensive substrate is soda lime glass.

The Cd2SnO4 and CdS layers are then placed in contact with each other in an environment substantially free of water and oxygen. Water and oxygen cause stains in the cadmium stannate film 24 which inhibit its optical and electrical properties. In this method, a suitable environment is flowing argon at ambient pressure. The substrates and layers are then heated for a period of time sufficient for the Cd2SnO4 layer to form

a uniform single-phase layer of Cd2SnO4 with a spinel crystal structure, substantially free of CdO, SnO2 and CdSnO3 phases. This uniform single-phase layer of Cd2SnO4 is referred to herein as the "cadmium stannate film 24," as distinguished from the layer of substantially amorphous Cd2SnO4 prior to treatment, which is generally referred to herein as the "Cd2SnO4 layer." The treatment temperature should be low enough to prevent softening and damage to the transparent substrate 22. Although higher temperatures result in superior cadmium stannate film 24 properties, satisfactory films have been obtained at temperatures less than 600"C. Twenty minutes was found to be a satisfactory period for treatment in laboratory experiments. Cadmium stannate films 24 prepared by the method described herein and having thicknesses of about 0.5 microns were found to have desirable optical and electrical properties.

After the heat treatment, the two substrates are cooled at a rate slow enough to avoid stress in the substrates and removed from each other. The transparent substrate 22 with its cadmium stannate film 24 is further processed to produce the photovoltaic device 20 of the present invention, as described below. The second substrate with its CdS layer may be reused until the CdS layer is too thin to perform properly. The second substrate may then be re-coated with a new layer of CdS and reused.

It is believed that during the heat treatment, CdS vapor is sublimated from the CdS layer and diffuses into the Cd2SnO4 crystal lattice, creating interstitial cadmium and oxygen vacancies and reducing the quantity of secondary phases present. Figure 2 shows a comparison of the X-ray diffraction patterns for the amorphous Cd2SnO4 layer prior to heat treatment and the cadmium stannate film after treatment. The data indicate a single-phase spinel crystal structure having a slightly larger lattice constant than Cd2SnO4 without interstitial cadmium.

Following cooling and separation from the CdS-coated second substrate, a first semiconductor layer 26 is deposited on the top surface of the cadmium stannate film 24. Contiguous to the first semiconductor layer 26 is a second semiconductor layer 28 having a conductivity type that is different from the conductivity type of first semiconductor layer 26. A back electrical contact 30 is disposed over the second semiconductor layer 28 and in ohmic contact therewith. The semiconductor layers 26

and 28 and the back contact 30 may be formed by any known process, such as chemical bath deposition, vapor deposition, electro-deposition, and the like.

Preferably, the first semiconductor layer 26 is deposited by a chemical bath deposition and the second semiconductor layer 28 is deposited by close-space sublimation, as.

described in the Examples hereof.

The photovoltaic device 20 may include an electrical contact or electrode pad (not shown) on the cadmium stannate film 24, the function and construction of which is known in the art and not a part of this invention. The photovoltaic device 20 may further include an anti-reflective (AR) coating (not shown) on the front surface of the transparent substrate 22 to enhance the initial transmission of light into the semiconductor material, which is also known in the art and not a part of this invention A significant advantage associated with the photovoltaic device of the present invention is the improved device performance due to the high conductivity of the cadmium stannate film. As will be appreciated by those of skill in the art, the conductivity of the transparent conducting film can be improved by increasing either the carrier concentration or the electron mobility. Surprisingly, however, the transparent conducting films in the photovoltaic devices of the present invention exhibit unusually high electron mobilities, even at high carrier concentrations.

Although the basis for this observation is not fully understood, it is believed that during the heat treatment, CdS vapor is sublimated from the CdS layer and diffuses into the Cd,SnO4 crystal lattice, creating interstitial cadmium and oxygen vacancies and thus generating free electrons.

Table 1 compares the thicknesses and electrical properties of two commercially available SnO2 films, a SnO2 film prepared using a tetramethyltin (TMT) process, and cadmium stannate films prepared as described in Example 1 below. In the table, Ilk is <BR> <BR> <BR> <BR> the sheet reslstivity, cm is electron mobility, n is the charge carrier concentration, and p is the resistivity. All values reported in Table 1 were obtained in the same laboratory using the same equipment and analytical techniques. Film thicknesses were determined from the position of neighboring interference maxima in optical transmittance curves, and cross checks were performed using a Dektak thickness profilometer. The values

for n, µ, and p were obtained by the Hall effect method, and Rs was measured by the four-point probe technique.

TABLE I Sample Thickness n µ # p Rs (substrate) (A) (cm-3) (cm2fVs) (Il-cm) (#/Sq.) Cd2SnO4-l 5100 8.94x1025 54.5 1.28 x 10-4 2.58 (7059 glass) Cd2SnO4-2 5500 6.58x1020 51.6 1.84x104 3.2 (soda-lime glass) SnO2-l ~lOooo 4.95 x 102° 15.4 8.18 x 10-4 8.6 (7059 glass) SnO2-2 3400 4.19 x 1020 33.0 4.53 x 10-4 13.4 (soda-lime glass) SnO2-3 10000 4.52 x 1020 42.0 3.29 x 10-4 3.3 (7059 glass) As shown in Table 1, even at a carrier concentration of about 9 x 1020 cm~3, the mobility remains high (about 55 cm2/Vs). These mobilities are substantially higher (approximately two to three times higher) than conventional SnO2 films doped to similar levels.

Also as shown in Table 1, the resistivity of cadmium stannate films is significantly lower (approximately two to six times lower) than that of conventional SnO2 films deposited on similar substrates. Thus, the photovoltaic devices of the present invention offer the important advantage of reduced series resistance and increased fill factor, and hence improved efficiency, due to the presence of these low- resistivity cadmium stannate films. Although this advantage applies to both small and large-area photovoltaic devices, reducing the series resistance in commercial modules is of particular interest, since the distance between laser scribe lines can be significantly increased without significant resistive power losses. Moreover, because the distance between scribe lines is increased, fewer scribe lines are required, thus improving throughput and reducing manufacturing costs.

Another significant advantage associated with the photovoltaic device of the present invention is the improved optical transmission and electrical resistance of the cadmium stannate film, as compared to existing devices comprising conventional TCO films. As previously discussed, conventional TCOs have high inherent sheet resistances, which causes ohmic losses in the transparent conducting film and reduces the efficiency of the device. Normally, to reduce the sheet resistance of these films, the thickness of the TCO layer must be increased, which decreases the optical transmission. Because of the superior conductivity of the cadmium stannate film, the TCO can be deposited in a thin layer, thereby improving the optical transmission and hence the amount of electromagnetic radiation that reaches the semiconductor material. Although the basis for this improvement is not fully understood, it is believed to result from the unusually high electron mobility of the cadmium stannate film, as previously discussed. Thus, the photovoltaic device of the present invention offers improved short circuit currents, and hence improved performance, over prior art devices.

A yet further significant advantage of the photovoltaic device of the present invention is the improved surface morphology of the transparent conducting film, which provides improved device performance. Figure 4 provides a comparison of the surface morphologies of a conventional SnO2 film (Figure 4a) and a cadmium stannate film (Figure 4b). As can be seen in Figure 4, the surface of the cadmium stannate film is significantly smoother than the surface of the SnO2 film. Data obtained from atomic force micrography indicate that the average surface roughness of the cadmium stannate film is an order of magnitude lower than that of the SnO2 film. It is well known that in a heterojunction solar cell, reducing the window layer absorption increases short circuit current (Jsc) In CdS/CdTe solar cells, this is typically achieved by reducing the CdS thickness (C. Ferekides, et al., 23rd IEEE SPVCProc. (1993) pp. 389-393). In general, a CdS/CdTe solar cell with a thin CdS layer has much better spectral response in the blue. However, reducing the thickness of the CdS film to between 600 Å and 700 Å can reduce the open circuit voltage and fill factor. During CdTe depositions and subsequent CdCl2 heat-treatment, the CdS film is either partially or completely

consumed forming a CdS1.xTQ intermixed layer. The CdS consumption reportedly increases as the CdS film thickness decreases (B.E. McCandless and S.S. Hegedus, 22nd IEEE SPVC Proc. (1991) pp. 967-972). As the CdS film thins, pinholes can develop and create CdTe/TCO (specifically CdTe/SnO2) junctions, which reduces the open circuit voltage and fill factor. The probability of pinhole formation increases, particularly for sputter deposited or CSS deposited CdS, as the SnO2 surface roughness increases (A. Rohatgi, et al., 22nd IEEE SPVC Proc. (1991) pp. 962-966).

Thus, because of the considerable improvement in surface morphology of cadmium stannate films and the concomitant reduction in pinhole formation, the photovoltaic device of the present invention provides a significant improvement in device performance.

Cadmium stannate films are also much easier to pattern than conventional SnO2 films (by etching in either HCl or HF), thus facilitating production and significantly expanding commercial applications of the photovoltaic device of the present invention.

Figure 5 shows a photolithographically patterned cadmium stannate film which was etched in dilute HCI for 2 minutes. As shown in Figure 5, cadmium stannate films provide excellent edge definition, which is particularly important for certain commercial applications, such as in advanced photovoltaic module and flat panel display device processing.

The photovoltaic device of the present invention is also more durable and stable (chemically and thermally) than existing devices due to the improved mechanical properties of the cadmium stannate film. In particular, cadmium stannate films deposited on glass substrates have good adhesion, are reasonably hard and scratch resistant, and exhibit high stability at elevated temperatures and over long periods of time. Moreover, the cadmium stannate films are less affected by post-deposition processing (i.e., CdCl2 heat-treatment) than conventional TCO films, thus improving process reproducibility and product yield. Finally, the photovoltaic device of the present invention is also economically advantageous. Highly efficient thin film devices can be produced using low cost substrates, such as soda lime glass substrates, thus reducing production costs.

The following examples demonstrate the practice and utility of the present invention but are not to be construed as limiting the scope thereof. Any suitable laboratory equipment known to those skilled in the art can be utilized to fabricate films and solar cells and analyze electrical and optical properties. In the examples, Cd2SnO4 layers are deposited onto substrates using a modified SC-3000 evaporation system, manufactured by CVC Products, Inc. Optical measurements are made with a Cary 2300 spectrophotometer, manufactured by Varian Company.

EXAMPLE 1 Thin films of cadmium stannate were prepared by RF magnetron sputtering.

The sputtering was carried out at room temperature in a modified SC3000 evaporation system, evacuated to a background pressure of -5 x 10-7 Torr and then backfilled with high purity oxygen. Corning 7059 glass substrates (sample Cd2SnO4-1) and soda-lime glass substrates (sample Cd2SnO4-2) were placed on a water-cooled sample holder parallel to the target surface. The distance between the substrate and the target was varied from 6 to 9 cm. The targets (33 mol % SnO2 and 67 mol % CdO) were reacted using a commercial hot pressed oxide target. X-ray diffraction showed that the target was single-phase orthorhombic Cd2SnO4. Deposition was performed at an oxygen partial pressure of 10-20 mTorr with the RF power between 100 and 140 Watts, providing an average deposition rate of about 10 nm min1 Sample Cd2SnO4-1 was heated at 680"C and sample Cd2SnO4-2 was heated at between 580" and 6000C for about 20 minutes in a tube furnace containing argon of 99.999% purity flowing at a rate of 1500 sccm. The samples were placed in contact with a CdS-coated glass substrate during the heat treatment. The CdS was previously deposited by chemical bath deposition as a thin layer on a glass substrate.

Figure 2 compares X-ray diffraction patterns obtained with a DMAX-A X-ray diffractometer, manufactured by Rigaku Company. The pattern of the as-deposited Cd2SnO4 layer shows an amorphous structure. In contrast, the diffraction pattern of the Cd2SnO4 film after the Ar/CdS heat treatment indicates a single-phase, cubic spinel

crystal structure. There is no evidence that secondary phases, such as CdO, SnO2, and CdSnO3 form in these films after crystallization.

Table 1 provides the electrical properties of the cadmium stannate films, two commercially available SnO2 films, and a film obtained from Dr. Christopher Ferekides at the University of South Florida (Sample USF), which was prepared using a tetramethyltin (TMT) process similar to that described by J. Proscia and R.G. Gordon, Thin Solid Films, 214 (1992), pp. 175-187. As evident from Table I, the cadmium stannate films have a lower resistivity (p) and higher mobility (,u) and carrier density (n) than SnO2 films of comparable thickness.

Figures 3a and 3b compare the transmittance (T) and absorbance (A), respectively, of a cadmium stannate film (Sample Cd2SnO4-l) and a commercially available SnO2 thin film deposited on Corning 7059 glass (Sample SnO2-1), manufactured by Solarex Corp. (Thin Film Division, 826 Newton Yaraley Road, Newton, PA 18940). The cadmium stannate film has a higher average transmittance (about 85 percent) over the visible portion of the spectrum as compared to the SnO2 film, even though the cadmium stannate film has a much lower resistivity. As can also be seen in Figures 3a and 3b, the cadmium stannate film has a lower absorbance in the visible range as compared to the SnO2 film, even at a carrier concentration of about 9 x 1020 cm 3 Figure 4 shows atomic force micrographs of the surface of both a cadmium stannate film (Sample Cd2SnO4-l) and a SnO2 thin film (Sample SnO2-1). The SnO2 thin film (Figure 4a), deposited by atmospheric pressure chemical vapor deposition using a SnCl4 chemistry, has an average surface roughness of 212 Å. In contrast, the Cd2SnO4-1 thin film (Figure 4b) has a very smooth surface with an average surface roughness of21 Å, which is an order of magnitude lower than that of the SnO2 film.

Figure 5 shows a photolithographically patterned cadmium stannate film (Cd2SnO4- 1) which was etched in dilute HCI for 2 minutes. Cadmium stannate films can be easily patterned by etching in either HCI or HF, with excellent edge definition.

EXAMPLE 2 A film of cadmium stannate (Cd2SnO4-1) is prepared as described in Example 1 and heat treated in argon for 20 minutes. The thermal stability of the cadmium stannate film was compared to a similarly treated SnO2 thin film (Sample SnO2-1). As indicated in Figure 6, the resistivity of the SnO2 film degrades when annealed at temperatures in excess of 5000C. In contrast, the cadmium stannate thin film is extremely stable at temperatures as high as 6500C.

EXAMPLE 3 A film of cadmium stannate (Cd2SnO4-1) was prepared as described in Example 1 and subjected to a residual gas analysis to determine the temperature stability ofthe film with respect to release of cadmium. The sample was heated to 400K at a pressure of 10-5 Torr in a UTI 1 00C Precision Gas Analyzer, manufactured by Uthe Technology International. No cadmium-containing gaseous species were detected, up to the detection limit of the technique. Thus, the cadmium stannate film is stable and does not decompose readily at elevated temperatures such as those likely to be encountered in most uses of TCO films.

EXAMPLE 4 A film of cadmium stannate (Cd2SnO4-1) was prepared as described in Example 1 and heat treated in contact with a layer of CdS at 680" C. The film was stored at room temperature, and the sheet resistance of the film was measured periodically during the year. No change in sheet resistivity (Ra) was observed, indicating that the cadmium stannate film properties are stable over extended periods of time.

EXAMPLE 5 To compare the electrical properties of the photovoltaic devices of the present invention with those of conventional devices, two sets of thin film CdS/CdTe solar cells comprising either cadmium stannate or SnO2 TCO films were fabricated and analyzed using identical methods, as described below.

Films of cadmium stannate (Cd2SnO4- 1) were prepared as described in Example 1; SnO2 thin films (Sample SnO2-1, Table 1) were purchased from Solarex Corp. (Thin Film Division, 826 Newton Yaraley Road, Newton, PA 18940).

A first semiconductor window layer of CdS was deposited on the top surface of the respective films by a chemical bath deposition (CBD) technique using CdAc2, NH4Ac, NH4OH and thiourea in an aqueous solution. Prior to CdS deposition, the substrates with a SnO2 layer were cleaned using a 1 % Liquinox in hot DI (deionized) water with thorough rinsing (5 minutes running DI water, 5 sonications in fresh DI, one sonication in hot DI). Substrates with a cadmium stannate film were cleaned by rinsing with TCE, then acetone, then IPA, followed by thorough rinsing.

The substrates were loaded into a quartz holder in a jacketed beaker and the chemical deposition bath was prepared as follows: (1) 550 mL of water was added to the jacketed beaker and was heated to 86-87"C using a recirculator; (2) 8 mL of a 0.033 M (8.88 g/l) cadmium acetate solution was added; (3) 5.3 111 of a 1 M (77.08 g/l) ammonium acetate solution was added; (4) 15 mL of a stock (30 %) ammonium hydroxide solution was added slowly, using a pipette; and (5) 8 mL of a 0.067 M (5.07 g/l) thiourea solution was added in four 2 mL aliquots with a 10 minute interval between each addition. During the entire procedure a magnetic stir bar was used to stir the solution. The jacketed beaker was kept covered to preserve temperature uniformity and pH level. Ten minutes after the final thiourea addition, the substrates were taken out and rinsed three times by sonication in warm DI water. The CdS films are 800-1000 Å thick and have an index of refraction of about 2.3. The CdS films were then pre-treated in H2 at 4000 C for 15 minutes.

Following the CdS anneal, approximately 10 microns of CdTe was deposited on the CdS films by close-space sublimation (CSS), as described by C. Ferekides, et al., 23rd IEEE SPVC Proc. (1993) pp. 389-393). During CSS deposition, the substrate and source temperatures were 600"C and 660"C, respectively. The distance between the substrate and the source was 0.2 cm, and the ambient pressure was 15 Torr (0.5 Torr O2 and 14.5 Torr He). After CSS deposition, the substrates were soaked in either a 25 % or 75 % saturated solution of CdCl2 at approximately 55°C for 15 minutes, where the saturated solution was 7.5 g cadmium chloride dissolved in 500cc methanol. The devices were then annealed at 400"C for 30 minutes in a tube furnace with a Help2 mixture (100 sccm He and 25 sccm 02). Following this anneal,

HgTe doped graphite paste and silver paste back contacts were deposited on the devices. A 1000 Å MgF2 anti-reflection (AR) coating was deposited on smaple Cd2SnO4- 1.

The photovoltaic device structure is shown in Figure 1. In the devices of the present invention, the cadmium stannate film replaces the SnO2 layer as the front contact. In the exemplified devices, the thickness of the cadmium stannate film was between 0.5 and 0.6 microns, with a sheet resistivity of about 3 Qisquare. However, as will be appreciated by those of skill in the art, the thickness of the cadmium stannate film can be varied as appropriate for the particular application. A thinner film provides a higher transmittance, and a thicker film provides a lower sheet resistance. Thus, when minimizing sheet resistance is more important than optimal transmission, the thickness of the cadmium stannate film can be increased accordingly. Alternatively, the film thickness can be minimized, thereby increasing the sheet resistance, when optimal transmission is required. Preferably, the cadmium stannate film is between about 0.2 and 2.0 microns thick, more preferably between about 0.3 and 0.7 microns thick, and most preferably about 0.5 microns thick. The cadmium stannate film preferably has a sheet resistivity less than about 10 ohm/square, and more preferably less than about 4 ohm/square. The thickness ofthe CdS layer was between 800 and 1000 Å, and the CdTe film thickness was about 10 microns.

Figure 7 provides an I-V curve for a cadmium stannate-based CdS/CdTe thin film solar cell. The electrical properties and performance data for the device shown in Figure 7 are as follows: open circuit voltage (VOC) = 0.8268 V; Vmax = 0.6831 V; Isc = 13.29 mA; Imax = 12.03 mA; Jsc = 22.13 mAcm~2; PmaX = 8.217 mW; fill factor = 74.80 %; and efficiency = 13.7 %. In general, cadmium stannate-based cells have higher fill factors than SnO2-based devices, probably due to the low resistivity of cadmium stannate films. This improved fill factor is particularly advantageous to large area CdS/CdTe modules.

Figure 8 compares the open circuit voltage (VOC) of the cadmium stannate- based and SnO2-based solar cells as a function of CdCl2 concentration. As shown in this figure, the cadmium stannate-based device has a significantly higher VOC than the

SnO2-based device for any particular CdCl2 concentration. This advantage likely results, in part, from the improved surface morphology of the cadmium stannate film, as previously discussed. However, the chemistry at the Cd2SnO4/CdS interface may also be an important contributing factor. Figure 8 also indicates that the VOC of Cd2SnO4-based CdS/CdTe devices is less dependent on the CdCl2 heat-treatment.

Because the cadmium stannate films are less affected by post-deposition processing than conventional TCO films, the photovoltaic devices of the present invention provide improved process reproducibility and product yield.

EXAMPLE 6 To compare the thermal stability of the photovoltaic devices of the present invention with conventional devices, three sets of thin film CdS/CdTe solar cells comprising either cadmium stannate or SnO2 TCO films were fabricated as described in Example 5. Films of cadmium stannate (Cd2SnO4- 1) were prepared as described in Example 1; SnO2 thin films (Sample SnO2-1) were purchased from Solarex Corp. (Thin Film Division, 826 Newton Yaraley Road, Newton, PA 18940); and SnO2 thin films (Sample SnO2-3) were prepared by a TMT process similar to that described by J. Proscia and R.G. Gordon, Thin Solid Films, 214 (1992), pp. 175-187.

Table 2 compares the sheet resistance (Ra) of the three sets of CdS/CdTe cells before and after CSS CdTe deposition, as measured by a Tencor M-gauge. As can be seen in Table 2, only the cadmium stannate films provide a sheet resistivity of less than 3 Q/square following CSS deposition. The thermal stability ofthe photovoltaic devices of the present invention is a particularly significant advantage, since CSS deposition typically involves processing temperatures as high as 600"C.

TABLE 2 Rs (square) TCO Sample Before IAfter Material CdTe deposition cdTe CdTe sition S12 8.4 8.3 SnO2-1 S8 8.2 8.1 (Solarex) U6 6.5 8.2 SnO2-3 U3 6.7 8.3 (USF) C4 2.6 2.5 Cd~SnO,-l 2.6 2.7 The foregoing description is considered as illustrative only of the principles of the invention. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the invention to the exact construction and process shown as described above. Accordingly, resort may be made to all suitable modifications and equivalents that fall within the scope of the invention as defined by the claims which follow.