Title:
PICK AND PLACE SYSTEM HAVING HYBRID EJECTOR
Document Type and Number:
WIPO Patent Application WO/2022/215810
Kind Code:
A1
Abstract:
A pick and place system having a hybrid ejector is disclosed. The disclosed pick and place system having a hybrid ejector is a pick and place system, which is applied after a deposition process to receive a deposition-completed ring frame, and separates a semiconductor chip from a PI film of the ring frame, picks the separated semiconductor chip, and then loads the picked semiconductor chip on a tray, and comprises: a work table, which fixedly holds a ring frame including a PI film attached to an edge thereof and semiconductor chips attached to the PI film, and provides a work space allowing the semiconductor chip to be separated from the PI film while the ring frame is fixedly held; a frame supply unit for loading the ring frame on the work table and collecting the ring frame to be collected after completing work on the work table; a hybrid ejector unit which is arranged under the work table and which forms vacuum pressure while in close contact with the lower surface of the PI film to pull the PI film downward so that the PI film is separated from an adjacent part that excludes the central part of the semiconductor chip; a chip transfer unit having an adsorption picker for adsorbing, picking, and transferring the semiconductor chip having a contact area reduced by means of the hybrid ejector unit; and an off-loader unit having a tray on which the semiconductor chip is loaded by being transferred through the chip transfer unit.
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Inventors:
YANG HAE CHOON (KR)
Application Number:
PCT/KR2021/010141
Publication Date:
October 13, 2022
Filing Date:
August 03, 2021
Export Citation:
Assignee:
TONITEC CO LTD (KR)
International Classes:
H01L21/67; B08B1/00; B08B5/04; H01L21/673; H01L21/677; H01L21/683
Foreign References:
| KR20210004298A | 2021-01-13 | |||
| KR101640533B1 | 2016-07-19 | |||
| KR20110050547A | 2011-05-13 | |||
| KR101489373B1 | 2015-02-12 | |||
| KR19990038969U | 1999-11-05 |
Attorney, Agent or Firm:
JUNG, Chang Su (KR)
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