Title:
PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC VALVE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2020/246090
Kind Code:
A1
Abstract:
Provided is a piezoelectric actuator capable of reducing the risk of air leakage caused by weakening of the compression force or air-tightness of a valve body with respect to the surface of a valve seat. The piezoelectric actuator is a piezoelectric actuator utilizing a piezoelectric valve that uses the displacement of stacked piezoelectric elements to open and close the valve, the actuator comprising: a valve body; stacked piezoelectric elements for generating, as displacement, actuation force necessary to operate the valve body; and a displacement magnification mechanism that magnifies the displacement of the stacked piezoelectric elements and causes the same to act upon the valve body, wherein the surface, of the valve body, that contacts the valve seat of the piezoelectric valve is smoothed in a state in which a pressurizing load has been placed upon the stacked piezoelectric elements.
Inventors:
ITO TAKAFUMI (JP)
MATSUSHITA TADASHI (JP)
HIGUCHI TOSHIRO (JP)
CHEE SZE KEAT (JP)
EBIHARA KUNIO (JP)
HIRATA TOSHITADA (JP)
MATSUSHITA TADASHI (JP)
HIGUCHI TOSHIRO (JP)
CHEE SZE KEAT (JP)
EBIHARA KUNIO (JP)
HIRATA TOSHITADA (JP)
Application Number:
PCT/JP2020/009798
Publication Date:
December 10, 2020
Filing Date:
March 06, 2020
Export Citation:
Assignee:
SATAKE ENG CO LTD (JP)
MECHANO TRANSF CORPORATION (JP)
MECHANO TRANSF CORPORATION (JP)
International Classes:
F16K27/02; F16K31/02; H01L41/09; H02N2/04
Foreign References:
| JPH09329252A | 1997-12-22 | |||
| JPH03172688A | 1991-07-26 | |||
| JP2013108568A | 2013-06-06 |
Other References:
See also references of EP 3982022A4
Attorney, Agent or Firm:
AIWA INTERNATIONAL PATENT AGENCY (JP)
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