Title:
PIEZOELECTRIC BULK WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/244635
Kind Code:
A1
Abstract:
Provided is a piezoelectric bulk wave device capable of suppressing leakage of elastic waves at a main surface of a piezoelectric layer. A piezoelectric bulk wave device 10 according to the present invention comprises: a support member 13 that includes a support substrate; a piezoelectric layer 14 that is provided on the support member 13 and that has first and second main surfaces 14a, 14b opposing each other; and an IDT electrode 11 that is provided on the first main surface 14a or the second main surface 14b of the piezoelectric layer 14 and that has a plurality of electrode fingers and first and second busbars 26, 27 (pair of busbars) opposing each other. An acoustic reflection part is provided to the support member 13. The acoustic reflection part overlaps at least a portion of the IDT electrode 11 in a plan view. When d represents the thickness of the piezoelectric layer 14 and p represents the distance between the centers of adjacent electrode fingers, d/p equals 0.5 or less. The first and second busbars 26, 27 each include at least one slit 22, 24 which extends in a direction intersecting a direction in which the electrode fingers extend.
Inventors:
NAGATOMO SHO (JP)
Application Number:
PCT/JP2022/019657
Publication Date:
November 24, 2022
Filing Date:
May 09, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2016084526A1 | 2016-06-02 | |||
| WO2019123811A1 | 2019-06-27 |
Foreign References:
| JP2020109957A | 2020-07-16 | |||
| JP2019092095A | 2019-06-13 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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