PIEZOELECTRIC DEFLECTION SENSOR - MURATA MANUFACTURING CO

Title:

PIEZOELECTRIC DEFLECTION SENSOR

Document Type and Number:

WIPO Patent Application WO/2017/082104

Kind Code:

A1

Abstract:

Provided is a piezoelectric deflection sensor with which it is possible to detect deflection of a mounted mounting substrate with high detection efficiency. A piezoelectric deflection sensor 1 configured such that: a first package substrate 3 is joined, interposed by a first joining-member layer 5, to a first main surface 11a of a first piezoelectric plate 11, which is rectangular or square in planar shape; and a second package substrate 4 is joined, interposed by a second joining-member layer 6, to a second main surface 11b of the first piezoelectric plate 11. A second electrode 12 is provided to one of the first main surface 11a and the second main surface 11b of the first piezoelectric plate 11, and first and second segmented electrodes 13, 14 are provided to the other of the first main surface 11a and the second main surface 11b of the first piezoelectric plate 11. The polarization-axis direction P of the first piezoelectric plate 11 runs parallel to the first and second main surfaces 11a, 11b, and extends along one edge of the rectangular or square shape. As viewed from above, a channel 10 extending in the direction intersecting the polarization-axis direction P is provided to the first package substrate 3 in a position where there is overlap of at least a portion of a first non-electrode-formation region between the first segmented electrode 13 and the second segmented electrode 14.

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Inventors:

CHIDA SHINGO (JP)
GENMEI YUYA (JP)
ICHIMARU MASAYUKI (JP)

Application Number:

PCT/JP2016/082318

Publication Date:

May 18, 2017

Filing Date:

October 31, 2016

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)

International Classes:

G01B7/16; H01L41/047; H01L41/053; H01L41/113; H01L41/257; H01L41/313

Foreign References:

JPH07253441A	1995-10-03
JPS6253364U	1987-04-02
JP2014062918A	2014-04-10
JPH1151960A	1999-02-26
JP2009295788A	2009-12-17

Attorney, Agent or Firm:

MIYAZAKI & METSUGI (JP)

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