Title:
PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/066936
Kind Code:
A1
Abstract:
The present invention provides a piezoelectric device retaining good piezoelectric properties with leakage between electrodes being suppressed. The piezoelectric device has, arranged in the following order on a first substrate, a first conductive film, a piezoelectric layer of an inorganic material, an adhesive layer, and a second conductive film.
Inventors:
NAGAOKA NAOKI (JP)
NAKAMURA DAISUKE (JP)
NAKAMURA DAISUKE (JP)
Application Number:
PCT/JP2019/037081
Publication Date:
April 02, 2020
Filing Date:
September 20, 2019
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L41/313; C23C14/50; H01L41/113; H01L41/187; H01L41/319
Domestic Patent References:
| WO2015098724A1 | 2015-07-02 | |||
| WO2017209081A1 | 2017-12-07 | |||
| WO2015053089A1 | 2015-04-16 |
Foreign References:
| JP2015186909A | 2015-10-29 | |||
| JP2005252069A | 2005-09-15 | |||
| JP2004075511A | 2004-03-11 | |||
| JP2018185551A | 2018-11-22 | |||
| JP2011222679A | 2011-11-04 |
Other References:
See also references of EP 3859803A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Download PDF:
Previous Patent: APPARATUS CONTROL SYSTEM, MOBILE BODY, APPARATUS CONTROL METHOD, AND PROGRAM
Next Patent: MOTOR UNIT AND MOTOR UNIT CONTROL METHOD
Next Patent: MOTOR UNIT AND MOTOR UNIT CONTROL METHOD