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Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/172259
Kind Code:
A1
Abstract:
In the present invention, a layered part (120) includes, above at least a recess (113), a single crystal piezoelectric layer (130) and a pair of electrode layers that apply voltage to the single crystal piezoelectric layer (130). A lower electrode layer (150) constituting at least part of the pair of electrode layers and present along a base part (111) side of the single crystal piezoelectric layer (130) is located only in the recess (113).

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Inventors:
KISHIMOTO YUTAKA (JP)
IKEUCHI SHINSUKE (JP)
Application Number:
PCT/JP2021/006585
Publication Date:
September 02, 2021
Filing Date:
February 22, 2021
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H04R17/00; H01L41/047; H01L41/187; H01L41/29; H03H9/17
Domestic Patent References:
WO2006001125A12006-01-05
Foreign References:
JP2009225232A2009-10-01
JP2015156626A2015-08-27
JP2013005250A2013-01-07
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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