Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/206050
Kind Code:
A1
Abstract:
A piezoelectric device (100) is provided with: a support substrate (110); an intermediate layer (140) disposed on the support substrate; a piezoelectric layer (130) disposed on the intermediate layer; a functional element (120) disposed on the piezoelectric layer; an insulating layer (150); and a wiring electrode (160). The insulating layer is disposed on the support substrate in contact with a side surface of a stack (105) formed by the intermediate layer and the piezoelectric layer. The wiring electrode is formed to extend from the top of the insulating layer to the top of the piezoelectric layer, and is connected to the functional element. The insulating layer includes a first region (AR1) and a second region (AR2). The first region is formed thinner than the stack. The second region includes a portion connecting the first region and the stack and inclining from the first region toward an upper surface (131) of the piezoelectric layer. The second region of the insulating layer does not extend to the top of the piezoelectric layer.
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Inventors:
WATANABE MUNEHISA (JP)
TANIGUCHI YASUMASA (JP)
DAIMON KATSUYA (JP)
TANIGUCHI YASUMASA (JP)
DAIMON KATSUYA (JP)
Application Number:
PCT/JP2021/014486
Publication Date:
October 14, 2021
Filing Date:
April 05, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2015098678A1 | 2015-07-02 |
Foreign References:
| JP2019179961A | 2019-10-17 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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