Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/256264
Kind Code:
A1
Abstract:
In the present invention, a layered part (120) includes, above at least an opening (113), the following: a first single-crystal piezoelectric layer (130); a second single-crystal piezoelectric layer (140); an intermediate electrode layer (150); a lower electrode layer (160); and an upper electrode layer (170). The first single-piezoelectric layer (130) is formed of a material by which a difference in the etching rate arises due to the positive side and the negative side of the polarization charge. The polarization charge of the first single-piezoelectric layer (130) is positive on the intermediate electrode layer (150) side and negative on the lower electrode layer (160) side.
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Inventors:
CHATANI MUNEHITO (JP)
Application Number:
PCT/JP2021/021023
Publication Date:
December 23, 2021
Filing Date:
June 02, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/047; H01L41/187; H01L41/257; H01L41/29; H03H9/17
Foreign References:
| JP2002076822A | 2002-03-15 | |||
| JP2005353876A | 2005-12-22 | |||
| JP2004312611A | 2004-11-04 | |||
| JP2006295380A | 2006-10-26 | |||
| JP2021086982A | 2021-06-03 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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