Title:
PIEZOELECTRIC ELEMENT AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/070712
Kind Code:
A1
Abstract:
A piezoelectric element according to the present invention comprises a first electrode, a piezoelectric layer including a piezoelectric material doped with Mg, and a second electrode that are stacked on a support substrate in this order. The piezoelectric element includes an Mg deficiency-preventing layer which is disposed between the first electrode and the piezoelectric layer and/or between the piezoelectric layer and the second electrode, and which reduces an outflow of Mg from the piezoelectric layer.
Inventors:
AOKI YUZUKI (JP)
NAKAMURA DAISUKE (JP)
TSUBURAOKA GAKU (JP)
SAKATA KOICHI (JP)
NAKAI TAKAHIRO (JP)
NAKAMURA DAISUKE (JP)
TSUBURAOKA GAKU (JP)
SAKATA KOICHI (JP)
NAKAI TAKAHIRO (JP)
Application Number:
PCT/JP2023/033440
Publication Date:
April 04, 2024
Filing Date:
September 13, 2023
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H10N30/853; H03H9/17; H10N30/06; H10N30/20; H10N30/30; H10N30/87
Domestic Patent References:
| WO2022163722A1 | 2022-08-04 |
Foreign References:
| JP2011119608A | 2011-06-16 | |||
| JP2009290369A | 2009-12-10 | |||
| JP2016082104A | 2016-05-16 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Download PDF: