Title:
PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/043383
Kind Code:
A1
Abstract:
This piezoelectric element (100) is provided with a lower electrode (2) formed on a substrate (1), a piezoelectric layer (3) formed on the lower electrode, and an upper electrode (4) formed on the piezoelectric layer. The upper electrode includes a first upper electrode layer (41) formed of a metal oxide in which at least the part on the border with the piezoelectric layer includes an amorphous portion, and a second upper electrode layer (42) formed on the first upper electrode layer.
Inventors:
TABUCHI YUSUKE (JP)
MATSUOKA GEN (JP)
IKEDA TAKASHI (JP)
MATSUOKA GEN (JP)
IKEDA TAKASHI (JP)
Application Number:
PCT/JP2016/075433
Publication Date:
March 16, 2017
Filing Date:
August 31, 2016
Export Citation:
Assignee:
SUMITOMO PRECISION PROD CO (JP)
International Classes:
H01L41/047; H01L41/09; H01L41/29
Foreign References:
| JP2015519720A | 2015-07-09 | |||
| JP2000208725A | 2000-07-28 |
Attorney, Agent or Firm:
MIYAZONO, Hirokazu (JP)
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