Title:
PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/091843
Kind Code:
A1
Abstract:
A piezoelectric element 30 comprises: a Pt film 23 for a lower electrode provided on the plane of a Si substrate 20; a PZT film 25 provided on the Pt film 23; and a Pt film 26 for an upper electrode provided on the PZT film 25. The PZT film 25 includes a perpendicularly oriented part 25a having a c axis in a direction perpendicular to the Pt film 23, and an obliquely oriented part 25b having a c axis which is inclined with respect to the c axis of the perpendicularly oriented part 25a. The c axis distribution of the perpendicularly oriented part 25a is discrete with respect to the c axis distribution of the obliquely oriented part 25b.
Inventors:
TANAKA HARUKI (JP)
Application Number:
PCT/JP2021/038453
Publication Date:
May 05, 2022
Filing Date:
October 18, 2021
Export Citation:
Assignee:
STANLEY ELECTRIC CO LTD (JP)
International Classes:
H01L41/187; B81C1/00; C23C14/08; G02B26/08; G02B26/10; H01L41/047; H01L41/09; H01L41/316
Foreign References:
| JP2015195343A | 2015-11-05 | |||
| JP2016219603A | 2016-12-22 | |||
| JP2011093788A | 2011-05-12 | |||
| JP2013197522A | 2013-09-30 | |||
| JP2008035600A | 2008-02-14 |
Other References:
See also references of EP 4228014A4
Attorney, Agent or Firm:
SATO & ASSOCIATES (JP)
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