Title:
PIEZOELECTRIC ELEMENT, METHOD FOR PRODUCING SAME AND PIEZOELECTRIC ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2017/051681
Kind Code:
A1
Abstract:
This piezoelectric element comprises a substrate, a lower electrode that is formed on the substrate, a piezoelectric film that is formed on the lower electrode, and an upper electrode that is formed on the piezoelectric film. The upper electrode is formed on a surface that has been subjected to planarization.
Inventors:
AKIYAMA NORIYUKI (JP)
NAKAMURA AKIRA (JP)
NAKAMURA AKIRA (JP)
Application Number:
PCT/JP2016/075678
Publication Date:
March 30, 2017
Filing Date:
September 01, 2016
Export Citation:
Assignee:
MITSUMI ELECTRIC CO LTD (JP)
AKIYAMA NORIYUKI (JP)
NAKAMURA AKIRA (JP)
AKIYAMA NORIYUKI (JP)
NAKAMURA AKIRA (JP)
International Classes:
H01L41/09; B81B3/00; B81C1/00; G02B26/08; G02B26/10; H01L41/047; H01L41/053; H01L41/23; H01L41/29; H01L41/332; G02B27/48
Domestic Patent References:
| WO2008090651A1 | 2008-07-31 |
Foreign References:
| JP2002151754A | 2002-05-24 | |||
| JP2007312164A | 2007-11-29 | |||
| JPH07235703A | 1995-09-05 | |||
| JP2014054802A | 2014-03-27 |
Other References:
See also references of EP 3340325A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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