Title:
PIEZOELECTRIC FILM, PIEZOELECTRIC LAYERED BODY, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC LAYERED BODY
Document Type and Number:
WIPO Patent Application WO/2021/002434
Kind Code:
A1
Abstract:
The present invention comprises a substrate, an electrode film, and a piezoelectric film which is a polycrystalline film comprising an alkali niobate having a perovskite structure represented by the compositional formula (K1-xNax)NbO3 (0 < x < 1), the piezoelectric film including at least one element selected from the group consisting of Cu and Mn, and said element being more abundant at grain boundaries of crystals constituting the piezoelectric film than in the parent phase of the crystals.
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Inventors:
KURODA TOSHIAKI (JP)
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
KIMURA TAKESHI (JP)
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
KIMURA TAKESHI (JP)
Application Number:
PCT/JP2020/026022
Publication Date:
January 07, 2021
Filing Date:
July 02, 2020
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
C01G45/00; C23C14/08; H01L41/09; H01L41/113; H01L41/187; H01L41/37; H03H3/02; H03H3/08; H03H9/17; H03H9/25
Domestic Patent References:
| WO2018180770A1 | 2018-10-04 |
Foreign References:
| JP2018207055A | 2018-12-27 | |||
| JP2015534257A | 2015-11-26 | |||
| JP2009120443A | 2009-06-04 | |||
| JP2007184513A | 2007-07-19 | |||
| JP2008159807A | 2008-07-10 |
Other References:
See also references of EP 3995454A4
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
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