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Patent Searching and Data


Title:
PIEZOELECTRIC FILM AND PREPARATION METHOD THEREFOR, AND PIEZOELECTRIC FILM SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/168750
Kind Code:
A1
Abstract:
A piezoelectric film (100) and a preparation method therefor, and a piezoelectric film sensor (10). The piezoelectric film comprises a first substrate (110), a conductive layer (120), and a piezoelectric layer (130); the conductive layer is disposed on the first substrate; the conductive layer is an aged ITO layer; the crystallinity of the conductive layer is 80% or more; the piezoelectric layer is disposed on the conductive layer; the piezoelectric layer contains a fluoropolymer, and the fluoropolymer does not comprise an α-phase fluoropolymer. The piezoelectric film has a shorter crystallization time, it is easier to form a β phase, and the piezoelectric performance of the piezoelectric film is improved.

Inventors:
DOU ZHONGSHANG (CN)
YU GUOHUA (CN)
Application Number:
PCT/CN2020/077019
Publication Date:
September 02, 2021
Filing Date:
February 27, 2020
Export Citation:
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Assignee:
NANCHAGN OFILM DISPLAY TECH CO LTD (CN)
International Classes:
H01L41/047
Foreign References:
CN110716667A2020-01-21
CN103493233A2014-01-01
CN106925140A2017-07-07
US20160181952A12016-06-23
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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