Title:
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND PRODUCTION METHOD FOR PIEZOELECTRIC LAMINATE
Document Type and Number:
WIPO Patent Application WO/2023/223815
Kind Code:
A1
Abstract:
The present invention pertains to a piezoelectric laminate having: a substrate; and a laminate film provided on at least one surface of the substrate. The laminate film includes an electrode layer, an underlying layer, and a thin piezoelectric film sequentially from the substrate side. The underlying layer is in contact with the thin piezoelectric film. The underlying layer contains zirconium nitride. The thin piezoelectric film has a hexagonal wurtzite structure which is aligned in the c-axis direction.
Inventors:
UMEDA KENICHI (JP)
NOGAMI AKIYO (JP)
AKITA MASAFUMI (JP)
NOGAMI AKIYO (JP)
AKITA MASAFUMI (JP)
Application Number:
PCT/JP2023/016981
Publication Date:
November 23, 2023
Filing Date:
April 28, 2023
Export Citation:
Assignee:
AGC INC (JP)
International Classes:
H10N30/853; H10N30/076; H10N30/079
Domestic Patent References:
| WO2014007015A1 | 2014-01-09 |
Foreign References:
| JP2020057654A | 2020-04-09 | |||
| JP2019145677A | 2019-08-29 |
Attorney, Agent or Firm:
EIKOH, P.C. (JP)
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