Title:
PIEZOELECTRIC LAMINATE, PRODUCTION METHOD FOR PIEZOELECTRIC LAMINATE, SPUTTERING TARGET MATERIAL, AND PRODUCTION METHOD FOR SPUTTERING TARGET MATERIAL
Document Type and Number:
WIPO Patent Application WO/2022/224594
Kind Code:
A1
Abstract:
The present invention comprises: a substrate which has a principal surface with a diameter of not less than 3 inches; and a piezoelectric film which is formed on the substrate, which contains potassium, sodium, niobium, and oxygen, and which comprises an alkali niobium oxide of a perovskite structure. The half width of the X-ray rocking curve of a (001) plane, in an X-ray diffraction measurement of the piezoelectric film, falls within the range of 0.5-2.5° in all regions of the inner part of the principal surface of the piezoelectric film excluding the circumferential edge part.
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Inventors:
KURODA TOSHIAKI (JP)
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
KIMURA TAKESHI (JP)
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
KIMURA TAKESHI (JP)
Application Number:
PCT/JP2022/009231
Publication Date:
October 27, 2022
Filing Date:
March 03, 2022
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
H01L41/187; C04B35/495; C23C14/08; C23C14/34; H01L41/316; H01L41/319
Domestic Patent References:
| WO2015194458A1 | 2015-12-23 | |||
| WO2015137198A1 | 2015-09-17 |
Foreign References:
| JP2011146623A | 2011-07-28 | |||
| JP2012167316A | 2012-09-06 | |||
| JP2000045066A | 2000-02-15 | |||
| JP2011146623A | 2011-07-28 |
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
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