Title:
PIEZOELECTRIC MEMS MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2021/174571
Kind Code:
A1
Abstract:
The present invention provides a piezoelectric MEMS microphone, comprising: a base having a back chamber, and a piezoelectric diaphragm arranged directly opposite to the back chamber. The piezoelectric diaphragm comprises a support portion arranged above the back chamber; the support portion divides the piezoelectric diaphragm into at least two vibration regions; the piezoelectric diaphragm further comprises at least one diaphragm arranged in each vibration region, the diaphragm comprising a fixed end connected to the base or the support portion, a free end arranged parallel to and opposite to the fixed end, and a main body portion connected to the fixed end and the free end, and the free end and the main body portion are both suspended above the back chamber; the width of the main body portion gradually decreases along a direction from the fixed end to the free end. Compared with the related art, the piezoelectric MEMS microphone has a high resonant frequency and a large sound pressure utilization area, so that the sensibility of the microphone is improved.
Inventors:
SHI ZHENGYU (CN)
TONG BEI (CN)
LI YANG (CN)
TONG BEI (CN)
LI YANG (CN)
Application Number:
PCT/CN2020/078762
Publication Date:
September 10, 2021
Filing Date:
March 11, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R19/00; H04R19/04
Domestic Patent References:
| WO2018207578A1 | 2018-11-15 |
Foreign References:
| CN110545511A | 2019-12-06 | |||
| CN110650420A | 2020-01-03 | |||
| CN109495829A | 2019-03-19 |
Attorney, Agent or Firm:
SHENZHEN ZICHEN INTELLECTUAL PROPERTY AGENCY LIMITED (CN)
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