Title:
PIEZOELECTRIC MEMS MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2021/237808
Kind Code:
A1
Abstract:
The present utility model provides a piezoelectric MEMS microphone, comprising a substrate, a diaphragm mounted on the substrate, and a protective flat plate spaced apart from the diaphragm. Reinforcing ribs are provided on the protective flat plate. According to the present utility model, by providing the reinforcing ribs on the protective flat plate of the piezoelectric MEMS microphone, at least partial region of the protective flat plate has a non-rectangular cross section in a direction parallel to the vibration of the diaphragm, the structural strength of the protective flat plate is thus improved, and the protective flat plate is not easy to break under the impact of the diaphragm.
Inventors:
DUAN LIAN (CN)
ZHANG RUI (CN)
ZHANG RUI (CN)
Application Number:
PCT/CN2020/095622
Publication Date:
December 02, 2021
Filing Date:
June 11, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R7/04; H04R19/04
Foreign References:
| CN110545514A | 2019-12-06 | |||
| CN204119498U | 2015-01-21 | |||
| CN202841518U | 2013-03-27 | |||
| CN204291344U | 2015-04-22 | |||
| CN210183520U | 2020-03-24 | |||
| CN110226332A | 2019-09-10 | |||
| US20150350790A1 | 2015-12-03 |
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
Download PDF:
Previous Patent: PMT CONTROL METHOD AND SYSTEM FOR MULTI-TERMINAL FLEXIBLE DIRECT CURRENT CONVERTER STATION
Next Patent: CHAIR LEG
Next Patent: CHAIR LEG