Title:
PIEZOELECTRIC PUMP
Document Type and Number:
WIPO Patent Application WO/2020/194988
Kind Code:
A1
Abstract:
This piezoelectric pump comprises: a first top plate; a second top plate; a diaphragm; a first side wall; and a second side wall. The diaphragm has a vibrating section to which a piezoelectric element is attached, a frame section, and a connecting section. Formed in the connecting section is a third opening that establishes communication between a first pump chamber and a second pump chamber, and formed in the frame section is a fourth opening that communicates with the third opening and that communicates with the outside. The piezoelectric pump further comprises: in the first pump chamber, an annular first valve that is provided so as to surround the first opening at an interval from the first opening in plan view; and in the second pump chamber, an annular second valve that is provided so as to surround the second opening at an interval from the second opening in plan view.
Inventors:
TANAKA NOBUHIRA (JP)
FUJISAKI MASAAKI (JP)
FUJISAKI MASAAKI (JP)
Application Number:
PCT/JP2020/000272
Publication Date:
October 01, 2020
Filing Date:
January 08, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B45/047
Domestic Patent References:
| WO2019230159A1 | 2019-12-05 | |||
| WO2019230160A1 | 2019-12-05 |
Foreign References:
| JP2019039436A | 2019-03-14 | |||
| JP2010223218A | 2010-10-07 | |||
| JP2009156454A | 2009-07-16 | |||
| US20150023821A1 | 2015-01-22 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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