Title:
PIEZOELECTRIC THIN FILM DEVICE
Document Type and Number:
WIPO Patent Application WO/1998/052280
Kind Code:
A1
Abstract:
A piezoelectric thin film device which is composed mainly of a substrate, a piezoelectric thin film formed on the substrate, and thin film electrodes formed on both the upper and lower surfaces of the thin film. The thin film is resonated by applying an AC voltage across the electrodes. A substrate removed section is formed by partially or entirely removing the substrate below the thin film and opened to both the front and rear surfaces of the substrate through openings so as to relieve the pressure variation in the substrate removed section below a resonant structure.
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Inventors:
YAMADA AKIRA (JP)
MAEDA CHISAKO (JP)
UMEMURA TOSHIO (JP)
UCHIKAWA FUSAOKI (JP)
MISU KOICHIRO (JP)
WADAKA SHUSOU (JP)
ISHIKAWA TAKAHIDE (JP)
MAEDA CHISAKO (JP)
UMEMURA TOSHIO (JP)
UCHIKAWA FUSAOKI (JP)
MISU KOICHIRO (JP)
WADAKA SHUSOU (JP)
ISHIKAWA TAKAHIDE (JP)
Application Number:
PCT/JP1997/001602
Publication Date:
November 19, 1998
Filing Date:
May 13, 1997
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
YAMADA AKIRA (JP)
MAEDA CHISAKO (JP)
UMEMURA TOSHIO (JP)
UCHIKAWA FUSAOKI (JP)
MISU KOICHIRO (JP)
WADAKA SHUSOU (JP)
ISHIKAWA TAKAHIDE (JP)
YAMADA AKIRA (JP)
MAEDA CHISAKO (JP)
UMEMURA TOSHIO (JP)
UCHIKAWA FUSAOKI (JP)
MISU KOICHIRO (JP)
WADAKA SHUSOU (JP)
ISHIKAWA TAKAHIDE (JP)
International Classes:
H03H3/02; H03H9/13; H03H9/17; (IPC1-7): H03H9/17; H04L41/08
Foreign References:
| JPS6068710A | 1985-04-19 | |||
| JPH08186467A | 1996-07-16 | |||
| JPS62266906A | 1987-11-19 | |||
| JPS6281807A | 1987-04-15 | |||
| JPH02162817A | 1990-06-22 |
Attorney, Agent or Firm:
Aoyama, Tamotsu (IMP Building 3-7, Shiromi 1-chome, Chuo-k, Osaka-shi Osaka 540, JP)
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