Title:
PIEZOELECTRIC THIN-FILM RESONATOR
Document Type and Number:
WIPO Patent Application WO/2022/102545
Kind Code:
A1
Abstract:
According to the present invention, a piezoelectric thin film (1) is provided with a piezoelectric element (10) and a substrate (4) that supports the piezoelectric element (10). The piezoelectric element (10) comprises the piezoelectric thin film (1) and a pair of electrodes (a first electrode (2) and a second electrode (3)) which are arranged so as to face each other, with the piezoelectric thin film (1) being interposed therebetween. The piezoelectric thin film (1) is configured such that: respective concentrations of aluminum content and scandium content on the first electrode (2) side are higher than those on the second electrode (3) side; and the concentration of nitrogen content on the first electrode (2) side is lower than that on the second electrode (3) side.
Inventors:
KIMURA TETSUYA (JP)
Application Number:
PCT/JP2021/040844
Publication Date:
May 19, 2022
Filing Date:
November 05, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17
Foreign References:
| JP2019207910A | 2019-12-05 | |||
| US20140354109A1 | 2014-12-04 | |||
| JP2009010926A | 2009-01-15 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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