Title:
PIEZOELECTRIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2020/136983
Kind Code:
A1
Abstract:
A piezoelectric transducer (100) is provided with a base part (110), a plate-shaped part (120), and a plurality of beam parts (130). The base part (110) has an annular outline as seen from the up/down direction. The plate-shaped part (120) is located on the inside of the base part (110), while being spaced apart from the base part (110). The plurality of beam parts (130) each connect the base part (110) and the plate-shaped part (120) to one another, and are arranged at an interval from one another in the circumferential direction of the base part (110). Each of the plurality of beam parts (130) has a piezoelectric layer (131), an upper electrode layer (132), and a lower electrode layer (133). The upper electrode layer (132) is arranged on the upper side of the piezoelectric layer (131). The lower electrode layer (133) is arranged so as to face at least a part of the upper electrode layer (132) with the piezoelectric layer (131) therebetween. The bending rigidity of the plurality of beam parts (130) is greater than that of the plate-shaped part (120).
Inventors:
IKEUCHI SHINSUKE (JP)
MOCHIDA YOICHI (JP)
KUROKAWA FUMIYA (JP)
UMEZAWA SEIJI (JP)
ADACHI NOBUYOSHI (JP)
MOCHIDA YOICHI (JP)
KUROKAWA FUMIYA (JP)
UMEZAWA SEIJI (JP)
ADACHI NOBUYOSHI (JP)
Application Number:
PCT/JP2019/032102
Publication Date:
July 02, 2020
Filing Date:
August 16, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H04R17/00; H01L41/053; H01L41/08; H01L41/107; H01L41/332
Foreign References:
| JP2017022576A | 2017-01-26 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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