Title:
PIEZOELECTRIC TYPE MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2018/061805
Kind Code:
A1
Abstract:
A piezoelectric type microphone is provided with: a plate (10a); a support portion (10b) disposed around the plate (10a); a link portion (10c) connecting the plate (10a) and the support portion (10b) via two or more sides of the plate (10a); and a detection portion (20) in which a lower electrode (21), a piezoelectric film (22), and an upper electrode (23) are stacked in this order. The detection portion (20) is stacked on the link portion (10c). The flexion point of a cross-sectional deformation curve when the plate (10a) and the link portion (10c) are deformed by sound pressure is in an area in which the detection portion (20) is not stacked.
Inventors:
HISHINUMA YOSHIKAZU (JP)
NAONO TAKAYUKI (JP)
SANO TAKAHIRO (JP)
NAONO TAKAYUKI (JP)
SANO TAKAHIRO (JP)
Application Number:
PCT/JP2017/033338
Publication Date:
April 05, 2018
Filing Date:
September 14, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H04R17/02; H01L41/113; H01L41/187
Foreign References:
| JP2013098724A | 2013-05-20 | |||
| JP2011097311A | 2011-05-12 | |||
| JPH08181360A | 1996-07-12 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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